Hockey Etal2014 SPIE Web

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Hockey Etal2014 SPIE Web - Proceedings of SPIE Douglas J. Guerrero , Yubao Wang , Kui Xu , Mary Ann Hockey , Eric Calderas, "Streamlined etch integration with a unique neutral layer for self-assembled block copolymers (BCPs)," Proceedings of SPIE, 2014, pp. 90492A-1 - 90492A-7 - Publications
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