Weigand Et Al SPIE2013 8685 Web

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Weigand Et Al SPIE2013 8685 Web - Proceedings of SPIE Sean Simmons , Douglas Guerrero , Qin Lin , Yubao Wang , Vandana Krishnamurthy , Michael Weigand , Brandy Carr, "Evaluating spin-on carbon materials at low temperatures for high wiggling resistance," Proceedings of SPIE, 2013, pp. 8685 - Publications
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