Guerrero Et Al SPIE2013 8680 Web preview
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Guerrero Et Al SPIE2013 8680 Web - Proceedings of SPIE Yubao Wang , Mary Ann Hockey , Douglas Guerrero , Eric Calderas, "Multifunctional hardmask neutral layer for directed self-assembly (DSA) patterning," Proceedings of SPIE, 2013, pp. 86801P-1 - 86801P-9 - Publications