Guerreroetal2008 6923Web

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Guerreroetal2008 6923Web - Proceedings of SPIE Ramil Mercado , Joyce Lowes , Steve Gibbons , Douglas J. Guerrero, "Anti-reflective coating for multipatterning lithography," Proceedings of SPIE, 2008, pp. 69230X-1 - 69230X-7 - Publications
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