Swope SPIE AL 2011 Preprint Web

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Swope SPIE AL 2011 Preprint Web - Proceedings of SPIE Chris Cox , Sean Simmons , Daniel Sullivan , Zhimin Zhu , Vandana Krishnamurthy , Michael Swope , Randy Bennett , Cheryl Nesbit, "Tailorable BARC system to provide optimum solutions for various substrates in immersion lithography," Pro - Publications
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