Guerrero SPIE AL 2011 Preprint Web

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Guerrero SPIE AL 2011 Preprint Web - Proceedings of SPIE Douglas J. Guerrero , Vandana Krishnamurthy , Daniel M. Sullivan, "BARC surface property matching for negative-tone development of a conventional positive-tone photoresist," Proceedings of SPIE, 2011, pp. 79720Q-1 - 79720Q-7 - Publications
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