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Brakensieketal6153-103preprint - Proceedings of SPIE Traci Batchelder , Sean Simmons , Gary Martin , Nickolas L. Brakensiek, "Reducing bottom anti-reflective coating (BARC) defects: Optimizing and decoupling the filtration and dispense process," Proceedings of SPIE, 2006, pp. 874-880 - Publications
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