Zhuetal2009 Reprint

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Zhuetal2009 Reprint - Proceedings of SPIE Charles J. Neef , Jan Macie , Yubao Wang , Emil Piscani , Zhimin Zhu , Brian Smith, "Thin hardmask patterning stacks for the 22-nm node," Proceedings of SPIE, 2009, pp. 72742K-1 - 72742K-7 - Publications
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