Neefetal2008 6923Web

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Neefetal2008 6923Web - Proceedings of SPIE Michael Weigand , Cheryl Nesbit , Jim Finazzo , Charles J. Neef, "Effects of bake temperature and surface modifications on hardmask materials for trilayer applications," Proceedings of SPIE, 2008, pp. 692331-1 - 692331-9 - Publications
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