CWashburnInterface06Web

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CWashburnInterface06Web - INTERFACE 2006: Proceedings of the 43rd Microlithography Symposium Douglas Guerrero , Alice Guerrero , Ramil Mercado , Carlton Washburn , Jim Meador, "Process development for developer-soluble bottom anti-reflective coatings (BARCs)," INTERFACE 2006: Proc - Publications
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