Xuetal2009 Reprint

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Xuetal2009 Reprint - Proceedings of SPIE Ke Min , Todd R. Younkin , James M. Blackwell , Hao Xu, "Underlayer designs to enhance the performance of EUV resists," Proceedings of SPIE, 2009, pp. 72731J-1 - 72731J-11 - Publications
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