65nm Node 193nm Paper Web

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65nm Node 193nm Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Evan Bryant , Mariya Nagatkina , Vandana Krishnamurthy , Charles J. Neef , Michelle Windsor , Cheryl Nesbit, "New BARC Materials for the 65-nm Node in 193-nm Lithography," Proceedings o - Publications
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