SPIE2010 Lowesetal Final Web

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SPIE2010 Lowesetal Final Web - Proceedings of SPIE Ramil-Marcelo L. Mercado , Ferdinand Rosas , Charlyn Stroud , Jim Meador , Victor Pham , Joyce Lowes , Mark Slezak, "Advantages of BARC and photoresist matching for 193-nm photosensitive BARC applications," Proceedings of SPIE, 2010, p - Publications
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