Guerreroetal2009 LithoAsia Preprint

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Guerreroetal2009 LithoAsia Preprint - Proceedings of SPIE Ramil-Marcelo L. Mercado , Daniel M. Sullivan , Douglas J. Guerrero, "Resist double patterning on BARCs and spin-on multilayer materials," Proceedings of SPIE, 2009, pp. 75200M-1 - 75200M-8 - Publications
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