Xie-SEMIChina2001 Web preview
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Xie-SEMIChina2001 Web - SEMICON China 2001 SEMI Technical Symposium Keith Strassner , Xie Shao , Paul Williams, "The Contributions of Organic Anti-reflective Coatings in Modern Optical Lithography," SEMICON China 2001 SEMI Technical Symposium, March 28-29, 2001, pp. G-1 - G-7 - Publications