Tangetal IMAPS DP 2010 preview
Problems viewing this document ?
Check that your browser and pdf plug-ins are up-to-date.
Manufacturer Tagged Keywords & Phrases
Tangetal IMAPS DP 2010 - IMAPS Device Packaging Conference Daniel J. Vestyck , Xie Shao , Kimberly Yess , Shelly Fowler , Ramachandran K. Trichur , Curt Planje , Tingji Tang, "Novel polymeric protective coatings for hydrofluoric acid vapor etching during MEMS release etch," IMAPS - Publications