Tangetal IMAPS DP 2010

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Tangetal IMAPS DP 2010 - IMAPS Device Packaging Conference Daniel J. Vestyck , Xie Shao , Kimberly Yess , Shelly Fowler , Ramachandran K. Trichur , Curt Planje , Tingji Tang, "Novel polymeric protective coatings for hydrofluoric acid vapor etching during MEMS release etch," IMAPS - Publications
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