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Brewer Science (70)

Innovative Materials Processes Equipment

Brewer Science is a global technology leader in developing and manufacturing innovative materials, processes, and equipment for the fabrication of semiconductors and microelectronic devices

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Zhu Etal2015 Web - 2015 China Semiconductor Technology International Conference (CSTIC) Amanda Riojas , Vandana Krishnamurthy , Joyce Lowes , Zhimin Zhu, "High-fidelity lithography," 2015 China Semiconductor Technology International Conference (CSTIC), March 15-16, 2015, pp - Publications Zhu Etal2015 Web : 2015 China Semiconductor Technology International Conference (CSTIC) Amanda Riojas , Vandana Krishnamurthy , Joyce Lowes , Zhimin Zhu, "High-fidelity lithography," 2015 China Semiconductor Technology International Conference (CSTIC), March 15-16, 2015, pp (PDF)
Zhuetal 2014 CSTIC ECS Trans 60 1 - ECS Transactions Dan Sullivan , Brian Smith , John Berron , Joyce Lowes , Zhimin Zhu, "Spin-coating defect theory and experiments," ECS Transactions, 2014, pp. 293-302 - Publications Zhuetal 2014 CSTIC ECS Trans 60 1 : ECS Transactions Dan Sullivan , Brian Smith , John Berron , Joyce Lowes , Zhimin Zhu, "Spin-coating defect theory and experiments," ECS Transactions, 2014, pp. 293-302 (PDF)
Guerrero 2014 SPIE Web - Proceedings of SPIE Douglas J. Guerrero, "Extending lithography with advanced materials," Proceedings of SPIE, 2014, pp. 905114-1 - 905114-10 - Publications Guerrero 2014 SPIE Web : Proceedings of SPIE Douglas J. Guerrero, "Extending lithography with advanced materials," Proceedings of SPIE, 2014, pp. 905114-1 - 905114-10 (PDF)
Hockey Etal2014 SPIE Web - Proceedings of SPIE Douglas J. Guerrero , Yubao Wang , Kui Xu , Mary Ann Hockey , Eric Calderas, "Streamlined etch integration with a unique neutral layer for self-assembled block copolymers (BCPs)," Proceedings of SPIE, 2014, pp. 90492A-1 - 90492A-7 - Publications Hockey Etal2014 SPIE Web : Proceedings of SPIE Douglas J. Guerrero , Yubao Wang , Kui Xu , Mary Ann Hockey , Eric Calderas, "Streamlined etch integration with a unique neutral layer for self-assembled block copolymers (BCPs)," Proceedings of SPIE, 2014, pp. 90492A-1 - 90492A-7 (PDF)
Romo Negreira Etal 2014 Web - Proceedings of SPIE K. Nafus , Y. Takashi , K. Shinichiro , M. Muramatsu , D. Parnell , T. Seo , D.J. Guerrero , N. Vandenbroeck , S. Demuynck , R. Gronheid , T.R. Younkin , A. Romo-Negreira , M.H. Somervell, "Evaluation of integration schemes for contact - Publications Romo Negreira Etal 2014 Web : Proceedings of SPIE K. Nafus , Y. Takashi , K. Shinichiro , M. Muramatsu , D. Parnell , T. Seo , D.J. Guerrero , N. Vandenbroeck , S. Demuynck , R. Gronheid , T.R. Younkin , A. Romo-Negreira , M.H. Somervell, "Evaluation of integration schemes for contact (PDF)
Weigand Et Al SPIE2013 8685 Web - Proceedings of SPIE Sean Simmons , Douglas Guerrero , Qin Lin , Yubao Wang , Vandana Krishnamurthy , Michael Weigand , Brandy Carr, "Evaluating spin-on carbon materials at low temperatures for high wiggling resistance," Proceedings of SPIE, 2013, pp. 8685 - Publications Weigand Et Al SPIE2013 8685 Web : Proceedings of SPIE Sean Simmons , Douglas Guerrero , Qin Lin , Yubao Wang , Vandana Krishnamurthy , Michael Weigand , Brandy Carr, "Evaluating spin-on carbon materials at low temperatures for high wiggling resistance," Proceedings of SPIE, 2013, pp. 8685 (PDF)
Brakensiek Et Al SPIE2013 8682A Web - Proceedings of SPIE Michael Cronin , Nick Brakensiek, "Point-of-use filter membrane selection, start-up, and conditioning for low-defect photolithography coatings," Proceedings of SPIE, 2013, pp. 868228-1 - 868228-9 - Publications Brakensiek Et Al SPIE2013 8682A Web : Proceedings of SPIE Michael Cronin , Nick Brakensiek, "Point-of-use filter membrane selection, start-up, and conditioning for low-defect photolithography coatings," Proceedings of SPIE, 2013, pp. 868228-1 - 868228-9 (PDF)
Guerrero Et Al SPIE2013 8680 Web - Proceedings of SPIE Yubao Wang , Mary Ann Hockey , Douglas Guerrero , Eric Calderas, "Multifunctional hardmask neutral layer for directed self-assembly (DSA) patterning," Proceedings of SPIE, 2013, pp. 86801P-1 - 86801P-9 - Publications Guerrero Et Al SPIE2013 8680 Web : Proceedings of SPIE Yubao Wang , Mary Ann Hockey , Douglas Guerrero , Eric Calderas, "Multifunctional hardmask neutral layer for directed self-assembly (DSA) patterning," Proceedings of SPIE, 2013, pp. 86801P-1 - 86801P-9 (PDF)
Bai Et Al 2012 IMAPS - IMAPS 2012 - 45th International Symposium on Microelectronics Curtis Planje , Michelle Fowler , Dongshun Bai , Xie Shao, "Planarization of deep structures using self-leveling materials," IMAPS 2012 - 45th International Symposium on Microelectronics, Septe - Publications Bai Et Al 2012 IMAPS : IMAPS 2012 - 45th International Symposium on Microelectronics Curtis Planje , Michelle Fowler , Dongshun Bai , Xie Shao, "Planarization of deep structures using self-leveling materials," IMAPS 2012 - 45th International Symposium on Microelectronics, Septe (PDF)
Swope SPIE AL 2011 Preprint Web - Proceedings of SPIE Chris Cox , Sean Simmons , Daniel Sullivan , Zhimin Zhu , Vandana Krishnamurthy , Michael Swope , Randy Bennett , Cheryl Nesbit, "Tailorable BARC system to provide optimum solutions for various substrates in immersion lithography," Pro - Publications Swope SPIE AL 2011 Preprint Web : Proceedings of SPIE Chris Cox , Sean Simmons , Daniel Sullivan , Zhimin Zhu , Vandana Krishnamurthy , Michael Swope , Randy Bennett , Cheryl Nesbit, "Tailorable BARC system to provide optimum solutions for various substrates in immersion lithography," Pro (PDF)
Guerrero SPIE AL 2011 Preprint Web - Proceedings of SPIE Douglas J. Guerrero , Vandana Krishnamurthy , Daniel M. Sullivan, "BARC surface property matching for negative-tone development of a conventional positive-tone photoresist," Proceedings of SPIE, 2011, pp. 79720Q-1 - 79720Q-7 - Publications Guerrero SPIE AL 2011 Preprint Web : Proceedings of SPIE Douglas J. Guerrero , Vandana Krishnamurthy , Daniel M. Sullivan, "BARC surface property matching for negative-tone development of a conventional positive-tone photoresist," Proceedings of SPIE, 2011, pp. 79720Q-1 - 79720Q-7 (PDF)
Brakensiek SPIE AL 2011 Preprint Web - Proceedings of SPIE Karl Anderson , Raul Ramirez , John Berron , Jennifer Braggin , Nick Brakensiek , Brian Smith, "Improving material-specific dispense processes for low-defect coatings," Proceedings of SPIE, 2011, pp. 79722Z-1 - 79722Z-7 - Publications Brakensiek SPIE AL 2011 Preprint Web : Proceedings of SPIE Karl Anderson , Raul Ramirez , John Berron , Jennifer Braggin , Nick Brakensiek , Brian Smith, "Improving material-specific dispense processes for low-defect coatings," Proceedings of SPIE, 2011, pp. 79722Z-1 - 79722Z-7 (PDF)
Lowes SPIE AL 2011 Preprint Web - Proceedings of SPIE Gary Dabbagh , Mark Slezak , David Torres , Shalini Sharma , Charlyn Stroud , Carlton Washburn , Michael Weigand , Alice Guerrero , Joyce Lowes , Cherry Tang, "Implementation of KrF DBARCs for implant applications on advanced lithograp - Publications Lowes SPIE AL 2011 Preprint Web : Proceedings of SPIE Gary Dabbagh , Mark Slezak , David Torres , Shalini Sharma , Charlyn Stroud , Carlton Washburn , Michael Weigand , Alice Guerrero , Joyce Lowes , Cherry Tang, "Implementation of KrF DBARCs for implant applications on advanced lithograp (PDF)
Lambetal2011 CSTIC Web - ECS Transactions Daniel Sullivan , David Drain , Zhimin Zhu , Chris Cox , James E. Lamb III, "Foundry efficiency gains through common photolithography themes," ECS Transactions, 2011, pp. 243-248 - Publications Lambetal2011 CSTIC Web : ECS Transactions Daniel Sullivan , David Drain , Zhimin Zhu , Chris Cox , James E. Lamb III, "Foundry efficiency gains through common photolithography themes," ECS Transactions, 2011, pp. 243-248 (PDF)
Washburnetal2011 CSTIC Web - ECS Transactions C. Washburn , J.A. Lowes , A. Guerrero, "Use of DBARCs beyond implant," ECS Transactions, 2011, pp. 249-255 - Publications Washburnetal2011 CSTIC Web : ECS Transactions C. Washburn , J.A. Lowes , A. Guerrero, "Use of DBARCs beyond implant," ECS Transactions, 2011, pp. 249-255 (PDF)
SPIE2010 BSmithetal Final Web - Proceedings of SPIE Yubao Wang , Zhimin Zhu , Steve McGarvey , Brian Smith , Dan Sullivan, "High-resolution defect metrology for silicon BARC analysis," Proceedings of SPIE, 2010, pp. 763824-1 - 763824-8 - Publications SPIE2010 BSmithetal Final Web : Proceedings of SPIE Yubao Wang , Zhimin Zhu , Steve McGarvey , Brian Smith , Dan Sullivan, "High-resolution defect metrology for silicon BARC analysis," Proceedings of SPIE, 2010, pp. 763824-1 - 763824-8 (PDF)
SPIE2010 Meadoretal Final Web - Proceedings of SPIE Ramil-Marcelo L. Mercado , Carlton Washburn , Anwei Qin , Brandy Carr , Charlyn Stroud , Joyce A. Lowes , Alice Guerrero , Jim D. Meador, "Photoresist-induced development behavior in DBARCs," Proceedings of SPIE, 2010, pp. 763926-1 - 7 - Publications SPIE2010 Meadoretal Final Web : Proceedings of SPIE Ramil-Marcelo L. Mercado , Carlton Washburn , Anwei Qin , Brandy Carr , Charlyn Stroud , Joyce A. Lowes , Alice Guerrero , Jim D. Meador, "Photoresist-induced development behavior in DBARCs," Proceedings of SPIE, 2010, pp. 763926-1 - 7 (PDF)
SPIE2010 Carretal Final Web - Proceedings of SPIE Brian Smith , Marc Weimer , April Evers , Brandy Carr , Jeff Leith, "Minimizing the outgassing of spin-coated organic materials to reduce defects," Proceedings of SPIE, 2010, pp. 763823-1 - 763823-7 - Publications SPIE2010 Carretal Final Web : Proceedings of SPIE Brian Smith , Marc Weimer , April Evers , Brandy Carr , Jeff Leith, "Minimizing the outgassing of spin-coated organic materials to reduce defects," Proceedings of SPIE, 2010, pp. 763823-1 - 763823-7 (PDF)
SPIE2010 SmithBraken Web - Proceedings of SPIE Jennifer Braggin , Nick Brakensiek , John Berron , Karl Anderson , Aiwen Wu , Raul Ramirez , Brian Smith , Carlton Washburn, "Improving material-specific dispense processes for low-defect coatings," Proceedings of SPIE, 2010, pp. 76392 - Publications SPIE2010 SmithBraken Web : Proceedings of SPIE Jennifer Braggin , Nick Brakensiek , John Berron , Karl Anderson , Aiwen Wu , Raul Ramirez , Brian Smith , Carlton Washburn, "Improving material-specific dispense processes for low-defect coatings," Proceedings of SPIE, 2010, pp. 76392 (PDF)
Tangetal IMAPS DP 2010 - IMAPS Device Packaging Conference Daniel J. Vestyck , Xie Shao , Kimberly Yess , Shelly Fowler , Ramachandran K. Trichur , Curt Planje , Tingji Tang, "Novel polymeric protective coatings for hydrofluoric acid vapor etching during MEMS release etch," IMAPS - Publications Tangetal IMAPS DP 2010 : IMAPS Device Packaging Conference Daniel J. Vestyck , Xie Shao , Kimberly Yess , Shelly Fowler , Ramachandran K. Trichur , Curt Planje , Tingji Tang, "Novel polymeric protective coatings for hydrofluoric acid vapor etching during MEMS release etch," IMAPS (PDF)
SPIE2010 Lowesetal Final Web - Proceedings of SPIE Ramil-Marcelo L. Mercado , Ferdinand Rosas , Charlyn Stroud , Jim Meador , Victor Pham , Joyce Lowes , Mark Slezak, "Advantages of BARC and photoresist matching for 193-nm photosensitive BARC applications," Proceedings of SPIE, 2010, p - Publications SPIE2010 Lowesetal Final Web : Proceedings of SPIE Ramil-Marcelo L. Mercado , Ferdinand Rosas , Charlyn Stroud , Jim Meador , Victor Pham , Joyce Lowes , Mark Slezak, "Advantages of BARC and photoresist matching for 193-nm photosensitive BARC applications," Proceedings of SPIE, 2010, p (PDF)
Xuetal2009 Reprint - Proceedings of SPIE Ke Min , Todd R. Younkin , James M. Blackwell , Hao Xu, "Underlayer designs to enhance the performance of EUV resists," Proceedings of SPIE, 2009, pp. 72731J-1 - 72731J-11 - Publications Xuetal2009 Reprint : Proceedings of SPIE Ke Min , Todd R. Younkin , James M. Blackwell , Hao Xu, "Underlayer designs to enhance the performance of EUV resists," Proceedings of SPIE, 2009, pp. 72731J-1 - 72731J-11 (PDF)
Meadoretal2009 Reprint - Proceedings of SPIE Mark Slezak , Victor Pham , Ramil-Marcelo L. Mercado , Yilin Qiu , Sherilyn Thomas , Charlyn Stroud , Joyce A. Lowes , Jim D. Meador, "Improving the performance of light-sensitive developer-soluble anti-reflective coatings by using ada - Publications Meadoretal2009 Reprint : Proceedings of SPIE Mark Slezak , Victor Pham , Ramil-Marcelo L. Mercado , Yilin Qiu , Sherilyn Thomas , Charlyn Stroud , Joyce A. Lowes , Jim D. Meador, "Improving the performance of light-sensitive developer-soluble anti-reflective coatings by using ada (PDF)
Neefetal2009 Reprint - Hardmask interactions on hardmask performance," Proceedings of SPIE, 2009, pp. 727311-1 - 727311-7 - Publications Neefetal2009 Reprint : Hardmask interactions on hardmask performance," Proceedings of SPIE, 2009, pp. 727311-1 - 727311-7 (PDF)
Zhuetal2009 Reprint - Proceedings of SPIE Charles J. Neef , Jan Macie , Yubao Wang , Emil Piscani , Zhimin Zhu , Brian Smith, "Thin hardmask patterning stacks for the 22-nm node," Proceedings of SPIE, 2009, pp. 72742K-1 - 72742K-7 - Publications Zhuetal2009 Reprint : Proceedings of SPIE Charles J. Neef , Jan Macie , Yubao Wang , Emil Piscani , Zhimin Zhu , Brian Smith, "Thin hardmask patterning stacks for the 22-nm node," Proceedings of SPIE, 2009, pp. 72742K-1 - 72742K-7 (PDF)
Baietal2009 Web - ECS Transactions Chris Lypka , Daniel Burgstaller , Jurgen Burggraf , Rama Puligadda , Xing-Fu Zhong , Dongshun Bai , James Verzosa, "Edge protection of temporarily bonded wafers during backgrinding," ECS Transactions, 2009, pp. 757-762 - Publications Baietal2009 Web : ECS Transactions Chris Lypka , Daniel Burgstaller , Jurgen Burggraf , Rama Puligadda , Xing-Fu Zhong , Dongshun Bai , James Verzosa, "Edge protection of temporarily bonded wafers during backgrinding," ECS Transactions, 2009, pp. 757-762 (PDF)
Washburnetal2009 Web - ECS Transactions April Evers , Carlton Washburn , Brian Smith, "Residue testing of developer-soluble bottom anti-reflective coatings," ECS Transactions, 2009, pp. 419-425 - Publications Washburnetal2009 Web : ECS Transactions April Evers , Carlton Washburn , Brian Smith, "Residue testing of developer-soluble bottom anti-reflective coatings," ECS Transactions, 2009, pp. 419-425 (PDF)
Guerreroetal2009 LithoAsia Preprint - Proceedings of SPIE Ramil-Marcelo L. Mercado , Daniel M. Sullivan , Douglas J. Guerrero, "Resist double patterning on BARCs and spin-on multilayer materials," Proceedings of SPIE, 2009, pp. 75200M-1 - 75200M-8 - Publications Guerreroetal2009 LithoAsia Preprint : Proceedings of SPIE Ramil-Marcelo L. Mercado , Daniel M. Sullivan , Douglas J. Guerrero, "Resist double patterning on BARCs and spin-on multilayer materials," Proceedings of SPIE, 2009, pp. 75200M-1 - 75200M-8 (PDF)
Guerreroetal2008 6923Web - Proceedings of SPIE Ramil Mercado , Joyce Lowes , Steve Gibbons , Douglas J. Guerrero, "Anti-reflective coating for multipatterning lithography," Proceedings of SPIE, 2008, pp. 69230X-1 - 69230X-7 - Publications Guerreroetal2008 6923Web : Proceedings of SPIE Ramil Mercado , Joyce Lowes , Steve Gibbons , Douglas J. Guerrero, "Anti-reflective coating for multipatterning lithography," Proceedings of SPIE, 2008, pp. 69230X-1 - 69230X-7 (PDF)
Sunetal2008 6923Web - Proceedings of SPIE Anwei Qin , Brian A. Smith , Sam X. Sun, "Wet trimming process for critical dimension reduction," Proceedings of SPIE, 2008, pp. 692336-1 - 692336-11 - Publications Sunetal2008 6923Web : Proceedings of SPIE Anwei Qin , Brian A. Smith , Sam X. Sun, "Wet trimming process for critical dimension reduction," Proceedings of SPIE, 2008, pp. 692336-1 - 692336-11 (PDF)
ZhuSPIEAL2008reprint - Proceedings of SPIE Brian Smith , Emil Piscani , Kevin Edwards , Zhimin Zhu, "Reflection control in hyper-NA immersion lithography," Proceedings of SPIE, 2008, pp. 69244A-1 - 69244A-7 - Publications ZhuSPIEAL2008reprint : Proceedings of SPIE Brian Smith , Emil Piscani , Kevin Edwards , Zhimin Zhu, "Reflection control in hyper-NA immersion lithography," Proceedings of SPIE, 2008, pp. 69244A-1 - 69244A-7 (PDF)
MeadorSPIEAL2008reprint - Proceedings of SPIE David Drain , Ramil-Marcelo L. Mercado , Douglas J. Guerrero , Zhimin Zhu , Joyce A. Lowes , Charlyn Stroud , Carol Beaman , Jim D. Meador, "Dual-layer dye-filled developer-soluble BARCs for 193-nm lithography," Proceedings of SPIE, 20 - Publications MeadorSPIEAL2008reprint : Proceedings of SPIE David Drain , Ramil-Marcelo L. Mercado , Douglas J. Guerrero , Zhimin Zhu , Joyce A. Lowes , Charlyn Stroud , Carol Beaman , Jim D. Meador, "Dual-layer dye-filled developer-soluble BARCs for 193-nm lithography," Proceedings of SPIE, 20 (PDF)
HuangWeigand2008 6923Web - Proceedings of SPIE Runhui Huang , Michael Weigand, "Plasma etch properties of organic BARCs," Proceedings of SPIE, 2008, pp. 69232G-1 - 69232G-9 - Publications HuangWeigand2008 6923Web : Proceedings of SPIE Runhui Huang , Michael Weigand, "Plasma etch properties of organic BARCs," Proceedings of SPIE, 2008, pp. 69232G-1 - 69232G-9 (PDF)
Neefetal2008 6923Web - Proceedings of SPIE Michael Weigand , Cheryl Nesbit , Jim Finazzo , Charles J. Neef, "Effects of bake temperature and surface modifications on hardmask materials for trilayer applications," Proceedings of SPIE, 2008, pp. 692331-1 - 692331-9 - Publications Neefetal2008 6923Web : Proceedings of SPIE Michael Weigand , Cheryl Nesbit , Jim Finazzo , Charles J. Neef, "Effects of bake temperature and surface modifications on hardmask materials for trilayer applications," Proceedings of SPIE, 2008, pp. 692331-1 - 692331-9 (PDF)
SPIE2007PreprintPhotoKrF-Mercado - Proceedings of SPIE Douglas J. Guerrero , Carlton A. Washburn , Joyce A. Lowes , Ramil-Marcelo L. Mercado, "A novel approach to developer-soluble anti-reflective coatings for 248-nm lithography," Proceedings of SPIE, 2007, pp. 65192X-1 - 65192X-10 - Publications SPIE2007PreprintPhotoKrF-Mercado : Proceedings of SPIE Douglas J. Guerrero , Carlton A. Washburn , Joyce A. Lowes , Ramil-Marcelo L. Mercado, "A novel approach to developer-soluble anti-reflective coatings for 248-nm lithography," Proceedings of SPIE, 2007, pp. 65192X-1 - 65192X-10 (PDF)
SPIE2007Preprint-Weimer - Proceedings of SPIE James Claypool , Charles J. Neef , Yubao Wang , Marc Weimer , Kevin Edwards , Zhimin Zhu, "Materials for and performance of multilayer lithographic schemes," Proceedings of SPIE, 2007, pp. 65192S-1 - 65192S-8 - Publications SPIE2007Preprint-Weimer : Proceedings of SPIE James Claypool , Charles J. Neef , Yubao Wang , Marc Weimer , Kevin Edwards , Zhimin Zhu, "Materials for and performance of multilayer lithographic schemes," Proceedings of SPIE, 2007, pp. 65192S-1 - 65192S-8 (PDF)
SPIE2007GapFill-HuangPreprint - Proceedings of SPIE Shannon Brown , Anwei Qin , Dan Sullivan , Runhui Huang, "Advanced developer-soluble gap-fill materials and applications," Proceedings of SPIE, 2007, pp. 65192T-1 - 65192T-8 - Publications SPIE2007GapFill-HuangPreprint : Proceedings of SPIE Shannon Brown , Anwei Qin , Dan Sullivan , Runhui Huang, "Advanced developer-soluble gap-fill materials and applications," Proceedings of SPIE, 2007, pp. 65192T-1 - 65192T-8 (PDF)
SPIE2007Preprint-Turner - Stripping of multilayer materials for FEOL and BEOL integration using single wafer tool techniques," Proceedings of SPIE, 2007, pp. 65192Q-1 - 65192Q-9 - Publications SPIE2007Preprint-Turner : Stripping of multilayer materials for FEOL and BEOL integration using single wafer tool techniques," Proceedings of SPIE, 2007, pp. 65192Q-1 - 65192Q-9 (PDF)
SPIE2007Preprint-Neef - Proceedings of SPIE Deborah Thomas , Charles J. Neef, "A novel 248-nm wet-developable BARC for trench applications," Proceedings of SPIE, 2007, pp. 65192Z-1 - 65192Z-8 - Publications SPIE2007Preprint-Neef : Proceedings of SPIE Deborah Thomas , Charles J. Neef, "A novel 248-nm wet-developable BARC for trench applications," Proceedings of SPIE, 2007, pp. 65192Z-1 - 65192Z-8 (PDF)
PhotonicsWest2007MalhotraPreprint - Proceedings of SPIE X.-F. Zhong , G.J. Brand , J. Dalvi-Malhotra, "Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: Application of the TALON WrapTM process," Proceedings of SPIE, 2007, pp. 64 - Publications PhotonicsWest2007MalhotraPreprint : Proceedings of SPIE X.-F. Zhong , G.J. Brand , J. Dalvi-Malhotra, "Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: Application of the TALON WrapTM process," Proceedings of SPIE, 2007, pp. 64 (PDF)
Puligaddaetal2007 - Materials Research Society Symposium Proceedings Markus Wimplinger , Chad Brubaker , Wenbin Hong , Sunil Pillalamarri , Rama Puligadda , Stefan Pargfrieder, "High-performance temporary adhesives for wafer bonding applications," Materials Research Society - Publications Puligaddaetal2007 : Materials Research Society Symposium Proceedings Markus Wimplinger , Chad Brubaker , Wenbin Hong , Sunil Pillalamarri , Rama Puligadda , Stefan Pargfrieder, "High-performance temporary adhesives for wafer bonding applications," Materials Research Society (PDF)
Meadoretal6153-100 Preprint - Proceedings of SPIE Carol Beaman , Joyce Lowes , Carlton Washburn , Ramil Mercado , Mariya Nagatkina , Charlyn Stroud , Jim Meador, "Development of 193-nm wet BARCs for implant applications," Proceedings of SPIE, 2006, pp. 854-863 - Publications Meadoretal6153-100 Preprint : Proceedings of SPIE Carol Beaman , Joyce Lowes , Carlton Washburn , Ramil Mercado , Mariya Nagatkina , Charlyn Stroud , Jim Meador, "Development of 193-nm wet BARCs for implant applications," Proceedings of SPIE, 2006, pp. 854-863 (PDF)
Qinetal6153-105preprint - Proceedings of SPIE Runhui Huang , Daniel M. Sullivan , Anwei Qin, "New developer-soluble gap-fill material with fast plasma etch rate," Proceedings of SPIE, 2006, pp. 881-888 - Publications Qinetal6153-105preprint : Proceedings of SPIE Runhui Huang , Daniel M. Sullivan , Anwei Qin, "New developer-soluble gap-fill material with fast plasma etch rate," Proceedings of SPIE, 2006, pp. 881-888 (PDF)
CWashburnInterface06Web - INTERFACE 2006: Proceedings of the 43rd Microlithography Symposium Douglas Guerrero , Alice Guerrero , Ramil Mercado , Carlton Washburn , Jim Meador, "Process development for developer-soluble bottom anti-reflective coatings (BARCs)," INTERFACE 2006: Proc - Publications CWashburnInterface06Web : INTERFACE 2006: Proceedings of the 43rd Microlithography Symposium Douglas Guerrero , Alice Guerrero , Ramil Mercado , Carlton Washburn , Jim Meador, "Process development for developer-soluble bottom anti-reflective coatings (BARCs)," INTERFACE 2006: Proc (PDF)
Morford6123-1reprint - Proceedings of SPIE JoElle Dachsteiner , Wu-Sheng Shih , Robert Morford, "Press-patterned UV-curable high refractive index coatings," Proceedings of SPIE, 2006, pp. 1-11 - Publications Morford6123-1reprint : Proceedings of SPIE JoElle Dachsteiner , Wu-Sheng Shih , Robert Morford, "Press-patterned UV-curable high refractive index coatings," Proceedings of SPIE, 2006, pp. 1-11 (PDF)
Huang6153-97corrected - Dense bias of BARCs and gap-fill materials on via wafers," Proceedings of SPIE, 2006, pp. 829-836 - Publications Huang6153-97corrected : Dense bias of BARCs and gap-fill materials on via wafers," Proceedings of SPIE, 2006, pp. 829-836 (PDF)
Washburnetal6153-95preprint - Proceedings of SPIE Nicki Chapman , Charlyn Stroud , Carlton Washburn , Nick Brakensiek , Kevin Edwards , Alice Guerrero, "Wet-recess process optimization of a developer-soluble gap-fill material for planarization of trenches in trench-first dual damascen - Publications Washburnetal6153-95preprint : Proceedings of SPIE Nicki Chapman , Charlyn Stroud , Carlton Washburn , Nick Brakensiek , Kevin Edwards , Alice Guerrero, "Wet-recess process optimization of a developer-soluble gap-fill material for planarization of trenches in trench-first dual damascen (PDF)
Guerreroetal6153-24preprint - Proceedings of SPIE Tomoyuki Enomoto , Shigeo Kimura , Douglas J. Guerrero , Masakazu Kato , Tamara Smith, "Two-layer anti-reflection strategies for implant applications," Proceedings of SPIE, 2006, pp. 242-249 - Publications Guerreroetal6153-24preprint : Proceedings of SPIE Tomoyuki Enomoto , Shigeo Kimura , Douglas J. Guerrero , Masakazu Kato , Tamara Smith, "Two-layer anti-reflection strategies for implant applications," Proceedings of SPIE, 2006, pp. 242-249 (PDF)
Brakensieketal6153-103preprint - Proceedings of SPIE Traci Batchelder , Sean Simmons , Gary Martin , Nickolas L. Brakensiek, "Reducing bottom anti-reflective coating (BARC) defects: Optimizing and decoupling the filtration and dispense process," Proceedings of SPIE, 2006, pp. 874-880 - Publications Brakensieketal6153-103preprint : Proceedings of SPIE Traci Batchelder , Sean Simmons , Gary Martin , Nickolas L. Brakensiek, "Reducing bottom anti-reflective coating (BARC) defects: Optimizing and decoupling the filtration and dispense process," Proceedings of SPIE, 2006, pp. 874-880 (PDF)
Coxetal6153-167preprint - Proceedings of SPIE Jonathan Mayo , Zhimin Zhu , Nick Brakensiek , Curtis Planje , Chris Cox, "Microlens formation using heavily dyed photoresist in a single step," Proceedings of SPIE, 2006, pp. 1378-1384 - Publications Coxetal6153-167preprint : Proceedings of SPIE Jonathan Mayo , Zhimin Zhu , Nick Brakensiek , Curtis Planje , Chris Cox, "Microlens formation using heavily dyed photoresist in a single step," Proceedings of SPIE, 2006, pp. 1378-1384 (PDF)
PhotWest2005RLMWeb2 - Proceedings of SPIE: Integrated Optics: Devices, Materials, and Technologies IX Doug Holmes , Udayan Senapati , Wu-Sheng Shih , Rebecca Rich , Ramil Mercado, "Press-patterned diffraction gratings on high refractive index polyimide films," Proceedings of S - Publications PhotWest2005RLMWeb2 : Proceedings of SPIE: Integrated Optics: Devices, Materials, and Technologies IX Doug Holmes , Udayan Senapati , Wu-Sheng Shih , Rebecca Rich , Ramil Mercado, "Press-patterned diffraction gratings on high refractive index polyimide films," Proceedings of S (PDF)
PhotWest2005RVMWeb2 - Proceedings of SPIE: Organic Photonic Materials and Devices VII T.D. Flaim , C.E. Planje , R.L. Mercado , R.V. Morford, "High refractive index photocurable resins," Proceedings of SPIE: Organic Photonic Materials and Devices VII, 2005, pp. 34-41 - Publications PhotWest2005RVMWeb2 : Proceedings of SPIE: Organic Photonic Materials and Devices VII T.D. Flaim , C.E. Planje , R.L. Mercado , R.V. Morford, "High refractive index photocurable resins," Proceedings of SPIE: Organic Photonic Materials and Devices VII, 2005, pp. 34-41 (PDF)
PhotWest2005YWWeb2 - Proceedings of SPIE: Organic Photonic Materials and Devices VII Curtis Planje , Doug Holmes , Shelly Fowler , Ramil Mercado , Tony Flaim , Yubao Wang, "Hybrid high refractive index polymer coatings," Proceedings of SPIE: Organic Photonic Materials and Dev - Publications PhotWest2005YWWeb2 : Proceedings of SPIE: Organic Photonic Materials and Devices VII Curtis Planje , Doug Holmes , Shelly Fowler , Ramil Mercado , Tony Flaim , Yubao Wang, "Hybrid high refractive index polymer coatings," Proceedings of SPIE: Organic Photonic Materials and Dev (PDF)
NB-PDD-Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXII Danielle King , Peng Zhang , Nickolas L. Brakensiek , Craig Ghelli, "Advanced rinse process alternatives for reduction of photolithography development cycle defects," Proceedings of SP - Publications NB-PDD-Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXII Danielle King , Peng Zhang , Nickolas L. Brakensiek , Craig Ghelli, "Advanced rinse process alternatives for reduction of photolithography development cycle defects," Proceedings of SP (PDF)
RH-conformality-Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXII Heping Wang , Runhui Huang , Anwei Qin, "A new method to characterize conformality of BARC coatings," Proceedings of SPIE: Advances in Resist Technology and Processing XXII, 2005, pp. - Publications RH-conformality-Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXII Heping Wang , Runhui Huang , Anwei Qin, "A new method to characterize conformality of BARC coatings," Proceedings of SPIE: Advances in Resist Technology and Processing XXII, 2005, pp. (PDF)
NB-drytime-Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXII Ryan Long , Nickolas L. Brakensiek, "Throughput increase by adjustment of the BARC drying time with coat track process," Proceedings of SPIE: Advances in Resist Technology and Processi - Publications NB-drytime-Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXII Ryan Long , Nickolas L. Brakensiek, "Throughput increase by adjustment of the BARC drying time with coat track process," Proceedings of SPIE: Advances in Resist Technology and Processi (PDF)
ST-FEOL-BEOL-Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXII Larry Wilson , Lynne Mills , Nick Brakensiek , Stephen Turner , Willie Perez , Paul Popa, "Hybrid BARC approaches for FEOL and BEOL integration," Proceedings of SPIE: Advances in Resis - Publications ST-FEOL-BEOL-Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXII Larry Wilson , Lynne Mills , Nick Brakensiek , Stephen Turner , Willie Perez , Paul Popa, "Hybrid BARC approaches for FEOL and BEOL integration," Proceedings of SPIE: Advances in Resis (PDF)
04semichina Final-perm Web - SEMICON China 2004 SEMI Technology Symposium Yiming Gu , Alice Guerrero , Xie Shao, "Wet-Developable Organic Anti-Reflective Coatings for Implant Layer Applications," SEMICON China 2004 SEMI Technology Symposium, March 17-19, 2004, - Publications 04semichina Final-perm Web : SEMICON China 2004 SEMI Technology Symposium Yiming Gu , Alice Guerrero , Xie Shao, "Wet-Developable Organic Anti-Reflective Coatings for Implant Layer Applications," SEMICON China 2004 SEMI Technology Symposium, March 17-19, 2004, (PDF)
193nm Trilayer Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Sam Sun , Randy Bennett , Denise Gum , Rama Puligadda , Mariya Nagatkina , Doug Holmes , Jim D. Meador , Tomoyuki Enomoto, "New Materials for 193-nm Trilayer Imaging," Proceedings of SP - Publications 193nm Trilayer Paper Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Sam Sun , Randy Bennett , Denise Gum , Rama Puligadda , Mariya Nagatkina , Doug Holmes , Jim D. Meador , Tomoyuki Enomoto, "New Materials for 193-nm Trilayer Imaging," Proceedings of SP (PDF)
Via Fill Properties Papers Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Runhui Huang, "Via-fill properties of organic BARCs in dual damascene application," Proceedings of SPIE: Advances in Resist Technology and Processing XXI, 2004, pp. 711-717 - Publications Via Fill Properties Papers Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Runhui Huang, "Via-fill properties of organic BARCs in dual damascene application," Proceedings of SPIE: Advances in Resist Technology and Processing XXI, 2004, pp. 711-717 (PDF)
Bottom ARC 157nm Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Joyce Lowes , Rama Puligadda , Liu He , Michael Rich, "Bottom Anti-Reflective Coatings (BARCs) for 157-nm Lithography," Proceedings of SPIE: Advances in Resist Technology and Processing - Publications Bottom ARC 157nm Paper Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Joyce Lowes , Rama Puligadda , Liu He , Michael Rich, "Bottom Anti-Reflective Coatings (BARCs) for 157-nm Lithography," Proceedings of SPIE: Advances in Resist Technology and Processing (PDF)
65nm Node 193nm Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Evan Bryant , Mariya Nagatkina , Vandana Krishnamurthy , Charles J. Neef , Michelle Windsor , Cheryl Nesbit, "New BARC Materials for the 65-nm Node in 193-nm Lithography," Proceedings o - Publications 65nm Node 193nm Paper Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Evan Bryant , Mariya Nagatkina , Vandana Krishnamurthy , Charles J. Neef , Michelle Windsor , Cheryl Nesbit, "New BARC Materials for the 65-nm Node in 193-nm Lithography," Proceedings o (PDF)
Gap Fill Materials Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Yasushi Sakaida , Satoshi Takei , Carlton Washburn , Kevin Edwards , Mandar Bhave , Yasuyuki Nakajima, "Developer-soluble gap fill materials for patterning metal trenches in via-first d - Publications Gap Fill Materials Paper Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Yasushi Sakaida , Satoshi Takei , Carlton Washburn , Kevin Edwards , Mandar Bhave , Yasuyuki Nakajima, "Developer-soluble gap fill materials for patterning metal trenches in via-first d (PDF)
Wet Recess Process Paper Web - Proceedings of SPIE: Advances in Resist Technology and Processing XXI Carlton Washburn , Brian Kidd , Nickolas L. Brakensiek , Earnie Murphy, "Wet-Recess Process Optimization of a Bottom Antireflective Coating for the Via-First Dual Damascene Scheme," Pro - Publications Wet Recess Process Paper Web : Proceedings of SPIE: Advances in Resist Technology and Processing XXI Carlton Washburn , Brian Kidd , Nickolas L. Brakensiek , Earnie Murphy, "Wet-Recess Process Optimization of a Bottom Antireflective Coating for the Via-First Dual Damascene Scheme," Pro (PDF)
Tech Paper Refractive Indices - Proceedings of SPIE: Organic Photonic Materials and Devices VI William DiMenna , Tony Flaim , Yubao Wang , Ramil Mercado , Udayan Senapati, "Thin-film polyetherimides with controlled refractive indices," Proceedings of SPIE: Organic Photonic Materials and - Publications Tech Paper Refractive Indices : Proceedings of SPIE: Organic Photonic Materials and Devices VI William DiMenna , Tony Flaim , Yubao Wang , Ramil Mercado , Udayan Senapati, "Thin-film polyetherimides with controlled refractive indices," Proceedings of SPIE: Organic Photonic Materials and (PDF)
Sm Spie Osd Paper - Proceedings of SPIE: Optical Systems Design 2003 Ramil Mercado , Yubao Wang , Tony Flaim, "High Refractive Index Polymer Coatings for Optoelectronics Applications," Proceedings of SPIE: Optical Systems Design 2003, 2003, pp. 423-434 - Publications Sm Spie Osd Paper : Proceedings of SPIE: Optical Systems Design 2003 Ramil Mercado , Yubao Wang , Tony Flaim, "High Refractive Index Polymer Coatings for Optoelectronics Applications," Proceedings of SPIE: Optical Systems Design 2003, 2003, pp. 423-434 (PDF)
Xie-SEMIChina2003 Web - SEMICON China 2003 SEMI Technology Symposium Paul Williams , Xie Shao, "Process Considerations for Organic Bottom Anti-Reflective Coating [BARC] Optimization for Front-End and Back-End-Of-Line Integration," SEMICON China 2003 SEMI Technology Symposium, Ma - Publications Xie-SEMIChina2003 Web : SEMICON China 2003 SEMI Technology Symposium Paul Williams , Xie Shao, "Process Considerations for Organic Bottom Anti-Reflective Coating [BARC] Optimization for Front-End and Back-End-Of-Line Integration," SEMICON China 2003 SEMI Technology Symposium, Ma (PDF)
Xie-SEMIChina2002 Web - SEMICON China 2002 SEMI Technical Symposium Keith Strassner , Xie Shao , Paul Williams, "Fundamentals in Bottom Anti-Reflective Coating Design for its Successful Integration into i-Line and DUV Manufacturing," SEMICON China 2002 SEMI Technical Symposium, - Publications Xie-SEMIChina2002 Web : SEMICON China 2002 SEMI Technical Symposium Keith Strassner , Xie Shao , Paul Williams, "Fundamentals in Bottom Anti-Reflective Coating Design for its Successful Integration into i-Line and DUV Manufacturing," SEMICON China 2002 SEMI Technical Symposium, (PDF)
Xie-SEMIChina2001 Web - SEMICON China 2001 SEMI Technical Symposium Keith Strassner , Xie Shao , Paul Williams, "The Contributions of Organic Anti-reflective Coatings in Modern Optical Lithography," SEMICON China 2001 SEMI Technical Symposium, March 28-29, 2001, pp. G-1 - G-7 - Publications Xie-SEMIChina2001 Web : SEMICON China 2001 SEMI Technical Symposium Keith Strassner , Xie Shao , Paul Williams, "The Contributions of Organic Anti-reflective Coatings in Modern Optical Lithography," SEMICON China 2001 SEMI Technical Symposium, March 28-29, 2001, pp. G-1 - G-7 (PDF)
2016 Semi Taiwan - Check out more information on Darron’s presentation - 9.7.16 event SEMICON Taiwan Taipei Nangang Exhibition Center · Taipei, Taiwan... 2016 Semi Taiwan : Check out more information on Darron’s presentation (PDF)

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