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Optics Laser Heads Laser-Interferometer Positioning Systems
Choose from large selection optical components system design flexibility
Design Your System Peak Performance Laser Head Specifications Directing Optics Specifications Measurement Optics Specifications Linear Optics Single Beam Optics Plane Mirror Optics Differential Interferometer Multiaxis Optics Wavelength Tracker Accessory Specifications Receiver Specifications Optics Laser Head Configuration Guide Example Configurations
This This product overview provides details laser heads, receivers, optics used Agilent Technologies laser interferometer positioning systems. Together with electronics information contained companion data sheets, this information will enable specify your entire laser positioning system. Select from following companion data sheets: Agilent 5527B Laser Interferometer Positioning System High Performance Laser Interferometer Positioning Systems VMEbus Complete, PC-compatible, Closed-loop Laser Positioning
Design Your System Peak Performance
wide variety optics laser heads from Agilent gives maximum design flexibility achieve your performance goals. addition full range conventional optics, multiaxis optics provide possibilities extremely accurate positioning system designs. Several laser heads offer different sizes axis velocities meet your requirements. Remote receivers with fiber-optic pickups allow maximum layout flexibility while removing electronics heat from measurement area superior repeatability. Optical wavelength tracking also assists achieving unsurpassed measurement repeatability. This product overview covers laser head specifications. Then, major part product overview devoted many optics Agilent developed directing laser beam making wide variety measurements. Accessories receivers covered next. Finally, extensive configuration guide illustrates number optical layouts specific applications. These examples provided help design optical layout that meets your measurement needs.
Configuring Your System
laser-interferometer positioning systems laser head, optics, electronics. After investigating choices this product overview companion electronics data sheets, configure your system First choosing backplane based other system electronics want outputs need, then choosing laser head based size velocity requirements, selecting optics that best match your application needs, finally, selecting environmental compensation that meets your accuracy needs.
Laser Head
Optics Directing Measuremen
Measurement Receivers
Object Control
Power Supply
Powe Drive Amplifier Servo otor Compe nsation
Compen sation Measur ement
Electr
onics
Enviro Sensonmental
Host Comp uter
Laser Head Specifications
Four laser heads available different size, velocity, interface requirements. Agilent 5517 series laser heads provides choices available size velocity requirements consistent interface. 5517A basic laser head. 5517B offers greater axis velocity smaller package. 5517C offers still higher velocity, higher than 5517A. 5517D offers highest axis velocity same size 5517B. Standard beam diameter addition, there beam size options available 5517C. Option provides 3-mm beam diameter with Agilent 10719A 10721A differential interferometers 10737L/R compact three-axis interferometers. Option provides 9-mm beam diameter with 10735A 10736A three-axis interferometers. larger beam allows these interferometers larger angular range measurement. Finally, Agilent 5501B laser head available replace previous 5501A laser head existing applications that require same polarization, cabling, electrical power 5501A. 5501B also offers improved accuracy, reliability, serviceability compared previous 5501A. laser heads proven long-life laser tube with demonstrated Mean Time Between Failure greater than 50,000 hours operation, making them most reliable lasers their type available.
Agilent 5501B 5517A/B/C/D Laser Heads
Physical Characteristics Weight: 5517A: 5517B/C/D: (7.5 5501B: (7.5 Warm-Up Time: less than minutes minutes typical) Magnetic Field Strength (Non-Operating): Does exceed 5.25 milli-Gauss distance from point surface packaged Laser Head. Clearance required cabling: 5517A: 12.0 (4.72 beyond back unit 5517B/C/D: 10.16 (4.0 beyond back unit 5501B: (3.0 beyond back unit Power Power Requirements: (5517A) +15V ±0.3V 2.5A -15V ±0.3V 0.02A (5517B/C/D) +15V ±0.3V 2.2A -15V ±0.3V 0.02A (5501B) +15V ±0.3V 0.79A -15V ±0.3V 0.67A Power Dissipation (nominal): Warm-Up: (5517A/B/C/D) Operation: (5517A/B/C/D) Maximum: 21.9W (5501B)
Laser Characteristics Type: Helium-Neon, Continuous Wave, Two-Frequency Minimum Beam Power Output: Maximum Beam Power Output: Std. Beam Diameter: (0.25 typical 5517C 003:3 (0.125 5517C 009:9 (0.375 Vacuum Wavelength Accuracy lifetime): ±0.1 (±0.02 with factory calibration MIL-STD 45662) Nominal Vacuum Wavelength: 632.991372 (5501B, 5517A/B) 632.991354 (5517C/D) Vacuum Wavelength Stability (one hour): ±0.002 typical Vacuum Wavelength Stability (lifetime): ±0.02 typical Safety Classification: Class Laser Product conforming U.S. National Center Devices Radiological Health Regulations 1040.10 1040.11. Reference Frequency: 5517A: 1.5-2.0 5517B: 1.9-2.4 5517C: 2.4-3.0 5517D: 3.4-4.0 5501B: 1.5-2.0
83.7 (3.30)
1.25 THREAD PLACES)
167.5 (6.59)
142.0 (5.59)
13.0 (0.51)
360.0 (14.17) 458.0 (18.03) 479.0 (18.85)
120.0 CLEAR (4.72) 25.0 (0.98) 83.0 (3.27) 192.0 (7.56) 22.3 (0.88) BEAM 55.1 (2.17) 118.0 (4.65) 435.0 (17.13) (0.24) BEAM
83.7 (3.30) 118.0 (4.65)
49.5 (1.95)
Agilent 5517A
7.11 (0.28) 25.4 (1.00)
13.7 (0.54) FULL RADIUS 208.3 (8.20) 139.6 (5.50)
Agilent 5501B Rear Panel
34.6 (1.36) 17.7 (0.70)
19.3 (0.76) 70.1 (2.76)
DETAIL PLACES 53.3 (2.30 (0.13 L.E.D. PLACES
132.0 (5.20)
101.6 (4.0)
325.2 (12.80 ±0.04)
(0.24) BEAM
106.4 (4.19)
43.4 (1.71)
128.3 (5.05)
34.6 (1.36)
20.2 (.80 45.6 (1.80 17.7 (0.70)
19.3 (0.76) 70.1 (2.76)
11.43 (0.45) 6.55 (0.26) (0.13) L.E.D. PLACES 10.7 (0.42)
68.0 (2.68)
128.3 (5.05)
BEAM 79.5 ±1.0 (3.13 ±0.04)
128.3 (5.05)
78.6 (3.1)
358.6 (14.12)
Agilent 5517B/C/D Rear Panel
Agilent 5501B, 5517B, 5517C, 5517D
Note: Dimensions drawings this product overview given millimeters, with corresponding dimensions inches given parentheses.
CAUTION
LASER LIGHT
STARE INTO BEAM MAXIMUM OUTPUT PULSE SPEC continuous wave LASER MEDIUM helium neon CLASS LASER PRODUCT
Directing Optics Specifications
variety beam splitting directing optics allows maximum flexibility optical layouts. Unless otherwise noted, optics designed beam diameters less. These optics have housings standard mounting techniques. Beams 9-mm diameter used with Agilent 10735A/10736A provide greater angular range. directing 9-mm beams, 10725A, 10726A, 10728A must used. These bare optics that require user-supplied mounts.
10700A Beam Splitter Use: Reflects total incoming laser beam, transmits Weight: (2.2 10701A Beam Splitter Use: Reflects total incoming laser beam, transmits Weight: (2.2 10707A Beam Bender Use: Bends incoming beam angle Weight: (2.1
25.4 (1.0) 19.6 (0.77 TYP)
(0.03) OFFSET
19.6 (0.77)
#6-32 PLC'S) THRU CLEARANCE 10.16 APERTURE (0.40 DIA)
25.4 (1.0)
19.6 (0.77) 25.4 (1.0)
#4-40 (0.15 DEEP) SIDES)
19.6 (0.77) 25.4 (1.0)
10567A Dual Beam Beam Splitter Use: beam splitter which allows both split beams return through splitter parallel incoming beam. Useful when necessary minimize number optical ports (for example vacuum chamber), when both receivers must mounted same area. Weight: (11.3
RETURN 53.3 (2.10) ENTRANCE RETURN
HOLES 8/32 FACES
RETURN
35.6 (1.40)
EXIT
19.1 (0.75)
12.7 (0.50)
12.7 (0.50) 12.7 (0.50) 21.6 (0.85)
12.7 (0.50) 19.1 (0.75)
EXIT RETURN
50.8 (2.00)
10725A 9-mm Laser Beam Splitter Use: beam splitter; divides beam into equal parts, transmits part straight through bends other part degree angle. designed with beams 9-mm diameter smaller. This bare optic requires user-supplied mount. Weight: (0.07
2.41± 0.25
019.3 0.13
10726A 9-mm Laser Beam Bender Use: Bends incoming beam degree angle. Like 10725A, designed with beams 9-mm diameter smaller bare optic that requires user-supplied mount. Weight: (0.35
30.48 5.59 7.62
Minimum clear aperture: central 10.05 26.92 ellipse
10728A 9-mm Laser Beam Plane Mirror Use: Normal incidence plane mirror. Like 10725A, designed with beams 9-mm diameter smaller bare optic that requires usersupplied mount. Weight: (0.74
6.35
Minimum clear aperture: central
Measurement Optics Specifications
variety optics allows maximum measurement flexibility. Unless otherwise noted, optics designed beam diameters less. Agilent 10702A Linear Interferometer basic interferometer linear measurements, while small 10705A Single-beam Interferometer designed confined spaces. multiaxis stages, plane mirror interferometers such Agilent 10706B commonly used (see pages 11). 10716A high-resolution plane-mirror interferometer provides twice resolution 10706B most precise applications (see page 13). 10715A plane-mirror interferometer designed differential measurements (see page 12). 10724A Plane Mirror Reflector used with these plane mirror interferometers single-axis measurements (see page 11). Agilent 10719A one-axis 10721A two-axis differential interferometers designed optimize accuracy repeatability IC-fabrication equipment referencing position wafer stage directly optics column. Agilent 10735A 10736A threeaxis interferometers make three measurements simultaneously (linear, yaw, pitch roll) precise wafer positioning IC-fabrication equipment other precision stage applications. pages through details these optics. Agilent 10717A Wavelength Tracker monitors changes index refraction optically compensate environmental changes (see page 22).
Linear Optics
10702A Linear Interferometer Use: general-purpose, single-axis measurements. interferometer moving component, then 10702A Opt. Windows MUST ordered, interferometer cannot used bend beam. Weight: 10702A: (8.2 10702A Opt. 001: (8.7
BEAM SPACING
12.7 (0.50) 28.5 (1.12 DIA)
#4-40 SCREWS #6-32 PLC'S) THRU CLEARANCE
38.2 (1.50)
62.0 (2.44)
20.83 APERTURE (0.82 DIA)
38.2 (1.50)
(1.26 TYP)
33.3 (1.31) SIDES) #4-40 0.25 DEEP
10703A Reflector Use: Paired with 10702A 10702A Opt. 001) Linear Interferometer. Cube corner reflector simplifies alignment. mass extremely critical, this component available without housing (10713B). Weight bare cube corner 11.4 (0.4 oz). Weight: (1.5
20.3 APERTURE (0.80 DIA)
(0.12)
33.3 (1.31)
37.6 (1.48 DIA)
28.4 (1.12 DIA)
(0.10) 23.9 (0.94)
Single Beam Optics
10704A Reflector Use: Paired with 10705A Single Beam Interferometer. Cube corner reflector simplifies alignment. mass extremely critical, this component available without housing (10713C). Weight bare cube corner (0.05 oz). Weight: 10.5 (0.4
19.5 (0.77) BOLT CIRCLE
10.2 APERTURE (0.40 DIA) (0.10)
20.5 (0.81 DIA)
15.2 (0.60)
(0.10)
14.3 (0.56)
10705A Single Beam Interferometer Use: mass/limited space single-axis measurements such disk-drive applications. used bend beam, cannot used moving component. Weight: 85.5
#2-56 SCREWS
15.2 (0.60)
39.6 (1.56) 25.4 (1.00) APERTURE (0.35) 19.5 (0.77)
25.4 (1.00)
19.5 (0.77) 19.6 (0.77 TYP)
#6-32 PLC's) THRU CLEARANCE
#2-56 PLACES)
Measurement Optics Specifications, continued
Plane Mirror Optics
10706B High-Stability Plane Mirror Interferometer Use: Multiple axis applications such stage. used bend beam, cannot used moving component. This thermally stable optic exact functional replacement 10706A Plane Mirror Interferometer. 10706B design improves measurement stability during temperature changes that affect optics reducing measurement drift 1/12 value typically achieved conventional planemirror interferometers such 10706A. Weight: (11.4 Thermal Drift Coefficient (Change indicated distance temperature change): 0.04 µm/°C (1.6 µin/°C) typical. Other specifications same 10706A. Typical Measurement Mirror Alignment Requirements 10706A function distance): in): arc-min from normal in): arc-min from normal in): ±1.5 arc-min from normal
BEAM SPACING
#4-40 SCREWS
12.7 (0.50)
28.4 (1.12 DIA)
38.1 (1.50)
(0.55)
38.1 (1.50)
(1.26 TYP)
28.5 (1.12 DIA)
85.9 (3.38)
20.8 APERTURE (0.82 DIA)
33.3 (1.31) 38.2 (1.50)
4-40 0.25 DEEP SIDES)
#6-32 PLC'S) THRU CLEARANCE
Interferometer Thermal Drift This plot shows measurement drift during optics temperature changes conventional plane-mirror interferometer compared with 10706B High Stability Plane Mirror Interferometer, 10715A Differential Interferometer, 10716A High Resolution Interferometer. 10706B nearly stable more expensive 10715A more stable than conventional plane-mirror interferometer. 10716A same stability 10706B with times better resolution. example, with ±0.5°C temperature control, measurement drift with 10706B 10716A typically ±0.02 microns (±0.8 µin) compared with ±0.25 microns (±10 µin) with conventional plane-mirror interferometer.
DRIFT TEMPERATURE TIME
+1.75 +1.50
INTERFEROMETER TEMPERATURE
27.00 26.50 26.00
MEASUREMENT DRIFT (Microns)
+1.25 +1.00 +.75 +.50 +.25
10715A CONVENTIONAL PLANE-MIRROR INTERFEROMETER
TEMPERATURE
25.50 25.00 24.50 24.00 23.50
10706B 10716A
+0.00 -.25 14.4 16.8 19.2 21.6
23.00
TIME (Hrs.) INTERFEROMETER TEMPERATURE MEASUREMENT DRIFT
10724A Plane Mirror Reflector Use: This reflector used with 10706A 10715A, 10716A interferometers single-axis measurements. Weight: (1.8 Adjustment Range: (Alignment hardware included) Reflectance: normal incidence Recommended Plane Mirror Specifications (for 10706A 10715A, 10716A reflectors) Reflectance: normal incidence Flatness: Flatness deviations will appear measurement errors when mirror scanned perpendicular beam. Recommended range (0.16 µin) (0.03 µin) dependent accuracy requirements. Optical Surface Quality: 60-40 0-13830
42.164 (1.660 DIA) 28.388 (1.118 DIA) 36.068 (1.420) 32.766 (1.290)
22.860 (0.900) APERTURE
20.066 (0.790) 3.810 (0.150)
3.556 (0.140) THRU
2-56 NC-CLASS THRU 120APART
Measurement Optics Specifications, continued
Differential Interferometer
10715A Differential Interferometer Use: Performs differential measurements between supplied reference mirror measurement plane mirror. Provides best long-term stability plane mirror interferometer plane mirror applications. Minimizes deadpath. Agilent 10715A eliminates thermal drift measurements because entire optical path through interferometer common mode. Alignment slightly more complex than 10706A/B. optical layouts requiring interferometer turn beam, 10715A Opt. must used. Weight: Interferometer: (1.31 Reference Mirror: (0.1
Typical Measurement Reference Mirror Alignment Requirements function distance): ±2.5 arc-min ±1.3 arc-min ±0.7 arc-min
EITHER BOTH REFERENCE MEASUREMENT BEAMS 22.9 12.7
5723'
complete dimensions drawing next page.
EITHER BOTH REFERENCE MEASUREMENT BEAMS PART NUMBER: 10715-20205 WEIGHT: GRAMS
18.3
Reference Mirror Agilent 10715A
10716A High Resolution Interferometer Use: Single multiple axis high resolution applications such precision stages. Agilent 10716A High Resolution Interferometer improves system measurement accuracy repeatability providing times better measurement resolution along with same thermal stability 10706B. optical layouts requiring interferometer turn beam, 10716A Opt. must used. Weight: (1.11 Thermal Drift Coefficient (Change indicated distance temperature change): 0.04 µm/°C (1.6 µin/°C) typical Typical Measurement Mirror Alignment Requirements: Depends distance between interferometer plane mirror. Typical mirror pitch/yaw angles are: arc-min arc-min arc-min
12.7 (0.50)
90.2 (3.55)
12.7 (0.50)
38.9 (1.53)
32.0 (1.26)
85.9 (3.38)
23.9 (0.94) 28.4 (1.12) 38.1 (1.50)
(0.32)
6-32 PLC'S) THRU CLEARANCE
32.0 (1.26) MIRRORS
12.7 (0.50)
FROM LASER RECEIVER
28.4 (1.12)
*FOR 10715A OPTION 10716A Option THIS DIMENSION 100.1 (3.94)
14.0 (0.55)
Agilent 10715A 10716A
Measurement Optics Specifications, continued
Multiaxis Optics
Improve Positioning Accuracy Sub-0.5micron Lithography Other Applications Agilent offers three styles multiaxis interferometers that make linear angular measurements. This gives greater control multiaxis stages allows better overall system accuracy. Each style available models. These interferometers provide linear angular measurements five degrees stage freedom pitch, roll, yaw). This gives capability measure position object with higher precision than linear measurements alone. Finer linewidths more accurate parts result from additional angular measurement control available with these interferometers. Agilent 10719A 10721A perform one- two-axis differential measurements respectively. Differential measurements provide highly accurate position information using object such optical column position reference. This reduces system errors those applications. Agilent 10737R, 10737L, 10735A, 10736A each perform three measurements, linear angular. These three measurement paths have built-in interaxis alignment give high system accuracy. 10737R 10737L 3-mm laser beam compact optic package. 10735A 10736A 9-mm laser beam provide widest angle range available. Increase system accuracy reduce costs Maximize system accuracy. Multiaxis optics provide measurement control stage rotations improved overlay accuracy. Maximize thermal stability. Monolithic optics equal glass path lengths minimize errors thermal drift. Maximize mechanical stability. Monolithic optics provide tight interaxis coupling minimize errors vibration. Minimize error interaxis misalignment. Optical design provides guaranteed interaxis parallelism, longer dependent installation. Lower installation costs. Referenced optics, kinematic installation, prealigned fiber-optic receiver mounts, interaxis adjustments make installation easy. Lower manufacturing costs. Multiaxis optics reduce number components install. Lower service cost. Fiber-optic receivers mounted convenient location, Agilent multiaxis interferometers easy remove install.
Agilent 10719A 10721A
Agilent 10735A 10736A Option
Applications Lithography Precision machining Advanced metrology multiaxis stage control Stage travel characterization Stage tool alignment
Multiaxis measurements allow smaller linewidths, wider fields, higher throughputs Small linewidths stage motion errors imperfect ways generally require state-of-the-art wafer steppers control rotational misalignment about axis (Yaw). This typically been done with discrete interferometers that require careful alignment during installation. Agilent offers multiaxis interferometers that make linear rotational measurements single compact package, conserving valuable space. interferometers were designed excellent built-in parallelism, providing interaxis alignment superior careful alignment discrete interferometers. This helps improve grid accuracy needed smaller linewidths. Internal optics referenced their housings, allowing interferometers kinematically located, then bolted into precision mount without adjustment. Built-in parallelism referenced optics save manufacture service time difficult multiaxis alignments. These features also help achieve better overlay accuracy than typically possible with discrete interferometers.
Pitch roll measurements enhance wide field optical lithography reduce linewidths, optical lithography systems such i-line deep moving toward larger numerical apertures. shallower depth field resulting from larger numerical aperture require site-by-site wafer leveling about axis (pitch roll) achieve focus over wide field. Unfortunately, alignment accuracy suffers because error, neutralized during global alignment, changes during wafer leveling. Agilent multiaxis interferometers measure pitch roll multiaxis stage leveling stage movement errors, making possible calculate compensate change error. quick correction saves time performing site-by-site alignment, thus improving throughput. Mirror mapping improves multiaxis stage performance multiaxis stage measured using two- three-axis interferometer located either axis. When measured redundantly both axes), system additional capability mirror mapping. Mirror mapping allows measure compensate flatness deviations stage mirrors. This improves total system accuracy.
Multiaxis interferometric measurements stage angles enhance accuracy throughput fine-line, wide-field lithography systems.
Measurement Optics Specifications, continued
10719A 10721A allow columnreferenced measurements Agilent 10719A 10721A One-axis Two-axis Differential Interferometers measure linear distance between objects, instead distance between interferometer object. This offers high degree immunity unwanted interferometer displacement such thermal expansion between optical column interferometer. Errors common reference measurement path removed because both equally affected. This improves overlay accuracy some lithography systems. offset error also decreased using small 3-mm beam. Both interferometers modular compact, making easier build customized measurement systems with axes. 10719A makes either differential linear angular measurement. linear measurement gauges displacement between objects such optical column stage. Alternatively, 10719A measures either pitch roll. 10721A simultaneously performs differential measurements, linear angular (yaw) displacement. Both measurements reference external mirror mounted object such column. Column referencing enhances semiconductor inspection Mask inspection typically require stage moved linearly small increments with respect inspection instrument such microscope. This required order compare desired image with newly created image. 10719A designed make linear measurements referencing object such inspection tool. X-ray systems benefit from column referencing X-rays provide finer linewidth lithography because wavelengths shorter than optical wavelengths. Slight misalignment reduces capability even more these systems than optical lithography systems, because finer linewidths. method achieve required accuracy reference multiaxis stage movement mask holder. 10719A 10721A have been optimized perform these measurements. Improve overlay accuracy with Agilent 10719A/10721A referencing imagemaking column. Additional features that increase accuracy decrease cost Monolithic optics Guaranteed interaxis parallelism Prealigned fiber-optic remote receiver mounting Referenced optics Kinematic Installation
Column
Reference Mirror Wafer Ref. Beam Meas. Beam
10719A 10721A
Stage
Measurement Mirror
10719A One-axis Differential Interferometer Use: Single- multiple-axis applications where stage must linearly positioned with respect external object such column inspection tool. Alternatively, angle measured when both reference measurement beams measure same mirror. Specifications Weight: Axes: Linear, pitch, roll Available Beam Size: Thermal Drift Coefficient (Average): (5.9 µin) Resolution* Linear: Pitch/roll: 0.03 µrad (0.007 arc-sec) Angular Range** mm): Pitch/roll: ±0.44 mrad (±1.5 arc-min) Parallelism (Input output beams): <0.1 mrad arc-sec)
10721A Two-axis Differential Interferometer Use: Multiaxis applications where stage must positioned linearly angularly with respect external object such column inspection tool. Specifications Weight: Axes: Linear Available Beam Size: Thermal Drift Coefficient (Average): (5.9 µin) Resolution* Linear: Yaw: 0.05 µrad (0.01 arc-sec) Angular Range** mm): Yaw: ±0.44 mrad (±1.5 arc-min) Parallelism (Input output beams): <0.1 mrad arc-sec)
10719A/10721A Installation Requirements/Recommendations Installation Alignment: Kinematic installation requires referenced surface. "Laser Optics Users Manual" complete installation procedure. Interaxis Alignment: internal optics referenced mounting surface prealigned. Receivers: Agilent 10780F fiber optic remote receivers. Receiver Alignment: Self aligning when mounted interferometer. Measurement Reference (Plane) Mirror Recommendations: Same 10706A/B; page
NOTE: Flatness deviations will appear measurement errors when mirror translated across beam. mirror mount should bend mirror. accuracy requirements demand mirror flatness calibrated (scanned stored system controller) used correction factor.
12.70 (0.500)
12.70 (0.500)
Output Aperture Input)
beams reference mirror beams measurement mirror
Input Aperture input beam
31.75 (1.250)
10719A Rear View
3.18 (0.125) Fiber Optic sensor head mounting pins Four mounting holes bottom surfaces. (6-32) 31.75 (1.250) 38.10 (1.500)
Front View
NOTE: Dimensions given millimeters (inches)
31.75 (1.250) 28.98 (1.141) 19.05 (0.750) 9.12 (0.359) 57.15 (2.250)
9.53 (0.375) 9.12 (0.359) 7.16 (0.282) 19.86 (0.782) 7.16 (0.282)
60.33 (2.375) 19.05 (0.750) Meas 31.75 (1.250) 31.75 (1.250)
Four beams reference mirror Four beams measurement mirror
Resolution dependent electronics used.
These specifications 10897B electronics.
Angular range maximum measurement mirror
angle components (i.e., pitch roll) between measurement mirror interferometer 6-axis system. Angular range dependent measurement distance. Angular range reduced when reference mirror misaligned.
10721A
Output Aperture Input Aperture input beam 12.70 (0.500) spacing between linear measurements 12.70 (0.500)
Output Aperture
10719A
10719A/10721A
10721A
Measurement Optics Specifications, continued
10737L 10737R Compact Three-Axis Interferometers Improve positioning accuracy precision equipment with lowercost, multiaxis laser measurements. Multiaxis measurements improve accuracy providing greater control multiaxis stages. Each linear angular degree freedom measured controlled compensate mechanical imperfections stage's motion. Agilent 10737L 10737R Compact Threeaxis Interferometers provide this capability more compact, lowercost package than 10735A 10736A Three-axis Interferometers. This allows higher accuracy from multiaxis measurements achieved smaller, lower-cost equipment than previously possible. Each 10737L 10737R makes three linear measurements. angular measurements calculated from this data. these interferometers used together provide redundant measurements, which allow mirror mapping. Mirror mapping improves accuracy compensating mirror flatness deviations. 10737L 10737R also reduce installation time cost. three axes aligned simultaneously process similar alignment 10706B High Stability Plane Mirror Interferometer. Both interferometers include built-in remote pickups 10780F Option Remote Receivers, which simplifies installation alignment. simple snap connection fiber optic cable quickly connects receiver remote pickups. 10737L 10737R differ only measurement beam direction; 10737L turns beam left 10737R turns beam right. Both interferometers 3-mm beam diameter from Agilent 5517C Option Laser Head.
Specifications
10737L 10737R Specifications Linear Resolution nm** 0.35 µrad (0.07 arc-sec)* 0.04 µrad (0.01 arc-sec)** µrad (0.14 arc-sec)* µrad (0.02 arc-sec)** ±0.44 mrad (±1.5 arc-min) Comparison 10735A 10736A nm** µrad (0.04 arc-sec)* 0.025 µrad (0.005 arc-sec)** 0.24 µrad (0.05 arc-sec)* 0.03 µrad (0.006 arc-sec)** mrad (±3.4 arc-min) ±1.5 mrad (±5.1 arc-min) mrad (±3.4 arc-min)
Improve positioning accuracy with more compact, lower-cost multiaxis measurements with 10737L 10737R compact three-axis interferometers.
Resolution
Pitch Roll Resolution
Range
Pitch Roll Range
±0.44 mrad (±1.5 arc-min)
Using 5527A/B, 10885A, 10895A electronics. Using 108978 electronics.
Using 6-mm beam diameter. Using 9-mm beam diameter. distance maximum measurement mirror angle components (i.e., pitch roll) between measurement mirror interferometer. six-axis system assumed.
Linear Range: total three axes Operating Temperature: 0-40°C (17-23°C ensure system non-linearity specification) Thermal Drift Coefficient: µm/°C µin/°C) typical average each axis Weight:
Materials Used: Housing: stainless steel aluminum Optics: optical grade glass Adhesives: vacuum grade Receiver inserts: urethane foam, acetal, glass fill polyester Installation: Uses 3-mm beam available from 5517C Option 003. Requires three 10780F Option Remote Receivers. Compatible with 10710A Mount.
Measurement (Plane) Mirror Recommendations Reflectance: normal incidence. Flatness: Flatness deviations will appear measurement errors when mirror scanned perpendicular beam. Recommended range (0.16 µin) (0.03 µin) dependent accuracy requirements. Optical Surface Quality: 60-40 0-13830.
Dimensions
VIEW
(1.26)
Fiber-Optic Connectors 10780F Option Receivers (1.26) From Laser
drilled clearance 4-40 screw tapped 6-32 UNC-2B .250 deep this side side Plane Mirror (4.69) 7.19 (0.283) 38.2 (1.50)
60.1 (2.37)
(0.12)
64.1mm (2.53) Input Apeture.
7.19 (0.283) 7.19 (0.283)
7.19 (0.283) 76.11 (3.00)
17.3 (0.68)
22.63 (0.891)
17.3 (0.68)
Agilent 10737L. dimensions 10737R identical.
Measurement Optics Specifications, continued
Additional features that increase accuracy decrease cost Wide angle range Monolithic optics Guaranteed interaxis parallelism Prealigned fiber-optic remote receiver mounting Referenced optics Kinematic Installation 10735A 10736A three-axis optical benches single packages 10735A 10736A Three-axis Interferometers functionality optical bench with multiple beam benders, beam splitters, three interferometers single highperformance package. This eliminates expensive, time-consuming interaxis setup alignment. interferometers split incoming laser beam into three beams measure linear distance, pitch, yaw; linear distance, roll, yaw. Custom Agilent factory fixtures measuring equipment align lock parallel beams guaranteed specifications greater stability accuracy than practical with discrete components. This gives greater overall system performance. Multiaxis installation simplified axes referenced interferometer's mounting surface easy kinematic installation onto usersupplied reference surface. This makes installation easy sliding interferometer into place bolting down. interferometers differ beam pattern they produce measurement mirror, providing flexibility system design. Three-axis interferometers provide highest angular performance available 10735A 10736A provide highest resolution, widest angular range, most accurately aligned three-axis interferometers available off-the-shelf. high angular resolution gives greater control over your multiaxis stage, enabling superior grid accuracy lithography applications. wide angular measurement range, with 9-mm laser beam, allows both global site-by-site stage correction under interferometric control. This helps achieve high positioning accuracy without degrading throughput.
Agilent 10735A 10736A replace three interferometers multiple beam benders beam splatters with rigid, high-performance package.
10735A/10736A Three-axis Interferometers Use: Multiaxis applications where linear angular control stage required. Agilent 10735A 10736A provide three linear measurements. angular measurements calculated from this data. When interferometer placed along axis, pitch derived addition linear displacement. When placed axis, roll derived addition linear displacement. Redundant useful when mapping measurement mirrors, which provides improved accuracy. 10735A 10736A differ their measurement beam patterns (see drawing). Agilent 10736A Option provides beam bender fixed compensation axis.
Specifications Weight: lbs) Axes: linear axes which provide linear (X), pitch, yaw; linear (Y), roll, yaw. Available Beam Diam.: 3/6/9 Thermal Drift Coefficient (Average): Axes (1.6 µin) Axis (3.9 µin) Resolution* Linear: Yaw: 0.024 µrad (0.005 arc-sec) Pitch/roll: 0.03 µrad (0.006 arc-sec) Angular Range displacement)** Pitch/roll: mrad (±3.4 arc-min) (for 6-mm beams): mrad (±3.4 arc-min) (for 9-mm beams): ±1.5 mrad (±5.1 arc-min) Parallelism (Measurement beams): Axes µrad arc-sec) Axes µrad arc-sec)
10735A/10736A Installation Recommendations Installation Alignment: Kinematic installation procedure requires three referenced pins mounted onto referenced surface. "Laser Optics Users Manual" complete installation procedure. Interaxis Alignment: internal optics referenced mounting surface prealigned. Receivers: Agilent 10780F Fiber Optic Remote Receivers. Receiver Alignment: Self aligning when mounted interferometer. Measurement (Plane) Mirror Recommendations: Same 10706A/B; page
203.5 (8.01) 179.0 (7.05)
(0.22)
105.0 (4.13)
88.5 (3.48)
NOTE: Dimensions given millimeters (inches) Mounting Holes 11.0 (0.43)
10735A
Input Aperture
10736A Axis Interferometer Axis Interferometer
21.0 (0.83)
51.3 (2.02)
10736A
Axis 60.0 (2.36)
10735A
Axis
Axis
Axis
Measurement Beam Patterns
10735A
31.25 (1.23)
26.0 (1.02) 13.11 (0.52) 42.5 (1.67)
10736A
Resolution dependent electronics used.
These specifications Agilent 10897B electronics. Angular range maximum angle between measurement mirror interferometer 6-axis system. Angular range dependent measurement distance. Both angles (pitch roll yaw) angular limit concurrently.
Axis
Axis
Measurement Optics Specifications, continued
Wavelength Tracker
10717A Wavelength Tracker Use: Tracks changes air's index refraction optically compensate environmental changes. Weight: (3.7 Kinematic Mounting: Angular Adjustment Range nominal position): Pitch: Yaw: Translation Adjustment Range nominal position): Vertical: (0.12 Horizontal: (0.12 Mounting Hardware Quantity: 3,10-32 UNF2A Screws Minimum Mounting Clearance Required: (0.12 around perimeter. Calibration: Required. Interface: Measurement receiver, cable, appropriate electronics required.
LASER MOUNTING SURFACE INPUT BEAM FROM LASER OUTPUT BEAM RECEIVER
260.35 (10.25) 177.80 0.25 (7.000 .010)
MOUNTING HOLES 10-32 (0.5)
15.88 (0.625)
30.10 0.13 (1.185 .005) 30.10 0.13 (1.185 .005)
79.25 (3.120) 39.62 (1.560)
(1.25)
CENTERLINE LASER BEAM
8.13 (0.320)
12.70 (0.500)
(2.63)
Accessory Specifications
Optics mounts make alignment faster easier, available most optics. Detailed specifications below. 10711A Adjustable Mount Use: Mount Agilent 10702A, 10706A/B, 10715A, 10716A Weight: 141.1 Angular Adjustment: Yaw: Tilt: 10722A Plane Mirror Converter Use: With additional 10703A, 10722A used convert 10702A Linear Interferometer into 10706A Plane Mirror Interferometer. With additional 10723A, 10722A used convert 10702A into 10706B. Weight: 35.5 (1.3
Optics Mounts
10710A Adjustable Mount Use: Mount Agilent 10700A, 10701A, 10705A, 10707A Weight: 88.2 (3.2 Angular Adjustment Range: Yaw: Tilt:
10711A
10723A High Stability Adapter Use: already 10706A, easily convert 10706B with 10723A High Stability Adapter. With 10723A obtain much higher thermal stability 10706B nominal cost effort. Weight: (1.7
#4-40 THRU PLC'S 32.0 (1.26)
10710A
25.4 THRU (1.00) CLEARANCE SCREW CLEARANCE SCREW (2.5 SCREW) 33.27 (1.31)
59.7 (2.35) 32.0 (1.26) 64.77 (2.55)
#4-40 THRU PLC'S 12.7 THRU (0.50)
41.66 (1.64) 19.6 (0.77) 47.0 (1.85)
38.1 (1.50) TILT
CLEARANCE #4-40 SCREW PLC'S 10702A 10706A/B 10715A 10716A BEAM SPACING 12.7 (0.50) 25.4 (1.00)
19.56 (0.77)
CLEARANCE #4-40 SCREW OPPOSITE SIDE 10700A 10701A 10705A 10707A BEAM CENTER LINE 25.4 (1.00) 12.7 (0.50) 31.75 (1.25)
TILT
12.7 (0.50)
27.9 (1.10)
Receiver Specifications
different measurement receivers available give design flexibility maximum system performance. receiver required each measurement axis (including wavelength tracker). Agilent 10780C affords highest sensitivity lowest cost. 10780F provides slightly less sensitivity, improve system performance enabling mount heat-dissipating receiver electronics away from measurement area. Hence, higher measurement stability resulting accuracy repeatability obtained. fiberoptic cable used attach remote sensor receiver electronics allows design flexibility easier access receiver gain adjustment.
Beam Diameter (0.24) 54.7 (2.15) 24.0 (0.945) Beam Spacing
Gain Adjustment Insulating Mounting Pads 38.1 (1.50) 107.8 (4.25)
(0.070) Photodetector 12.7 (0.50)
76.0 (3.0) (0.09 TYP) 114.8 (4.52) Clearance hole (6-32) Screw PLC)
11.4 (0.45)
(0.30) 15.2 (0.60) (0.39)
Only Nylon Mounting Screw 2360-0369 Avoid Ground Loop
Agilent 10780C Receiver
10780C Receiver 10780F Remote Receiver Specifications Typical Power Requirements: volts Maximum Sensitivity: (10780C) (10780F with cable) (10780F becomes with 10-m fiber cable.) Heat Dissipation: remote sensor typical receiver
Output Signal: Differential square wave Doppler-shifted split frequency (100 MHz). Fiber-optic Cable Length (10780F): standard maximum recommended Alignment Tolerances: Roll: degrees Pitch: degree Yaw: degree (10780F self aligning when mounted 10715A, 10716A, 10717A, 10719A, 10721A, 10735A, 10736A.)
Weight: (4.8 10780C (4.5 10780F (0.9 remote sensor with cable
Beam Diameter (0.24) Beam Spacing (0.30) (0.39)
12.7 (0.50)
(0.070) 54.7 (2.15) 24.0 (0.945)
(0.30) 23.8 (0.94) 19.1 (0.75) 22.4 (0.88)
Photodetector
(0.14) 15.5 (0.61)
43.1 (1.70) (3.0) 114.8 (4.52) 107.8 (4.25) 38.1 (1.50) 19.1 (0.75) (0.30) Clearance hole (6-32) Screw PLC)
Clearance hole (6-32) Screw PLC) Minimum (1.4) Bend Radius
Agilent 10780F Remote Receiver
0ptics Laser Head Configuration Guide
this configuration guide design your Agilent laser interferometer positioning system. Generally will first refer appropriate electronics data sheet choose electronics accordingly. Then select your laser head based size axis velocity requirements. Next, sketch your optical configuration. From this layout, determine your optics needs. additional years returnto-Agilent service available purchase laser heads electronics Option W30. Contact your local Agilent sales representative details.
Component Needs Comments
Laser Head 5517A 5517B 5517C Opt. Opt. 5517D 5501B required system Laser Head, lowest velocity, largest size Laser Head, more velocity, small size Laser Head, more velocity, small size 3-mm beam diameter with 10719A 10721A 9-mm beam diameter Laser Head, highest velocity, small size Laser Head, lowest velocity, small size, interface same 5501A
Factory Calibration MIL-STD 45662 available extra cost, specified order. Directing Optics 10700A 10701A 10707A 10567A 10725A 10726A 10728A Measurement Optics 10702A Opt. 10703A 10704A 10705A 10706B 10713B 10713C 10713D 10715A Opt. 10716A Opt. 10724A 10719A 10721A 10735A 10736A Opt. 10737L 10737R Order required manipulate beam path your configuration Beam Splitter Beam Splitter Beam Bender Dual Beam Splitter-useful vacuum 9-mm Laser Beam Splitter 9-mm Laser Beam Bender 9-mm Laser Beam Plane Mirror interferometer-plus-reflector pair required axis Linear Interferometer Windows-required interferometer moving component Reflector-paired with 10702A Reflector-paired with 10705A Single Beam Interferometer High Stability Plane Mirror Interferometer One-inch bare cube corner 0.5-inch bare cube corner 0.25-inch bare cube corner Differential Interferometer Turned Configuration High Resolution Interferometer Turned Configuration Plane Mirror Reflector One-axis Differential Interferometer, requires 3-mm beam Two-axis Differential Interferometer, requires 3-mm beam Three-axis Interferometer Three-axis Interferometer Adds beam bender Compact Three-axis Interferometer (Left) Compact Three-axis Interferometer (Right)
Measurement Optics Summary
10702A Application General Purpose (316.5 12.7 (1/2 10703A (1.5 10711A 10705A Low-mass, Limited Space (316.5 single beam 10704A 10.5 (0.4 10710A 10706B Plane Mirror (158.25 /128 12.7 (1/2 10724A (1.8 10711A 10715A High Accuracy Plane Mirror (158.25 /128 12.7 (1/2 10724A (1.8 10711A 10716A High Resolution Plane Mirror /256 (2.5 12.7 (1/2 10724A (1.8 10711A
Optics Resolution System Resolution* Beam Separation
Reflector Reflector Weight
Mount Used
10717A Application Wavelength Light Compensation
10719A One-axis Differential Measurements (Plane Mirror)
10721A Two-axis Differential Measurements (Plane Mirror)
10735A Three-axis Measurements (distance, pitch, yaw) (Plane Mirror)
10736A Three-axis Measurements (distance, pitch, yaw) (Plane Mirror)
Optics Resolution Linear System Resolution* Linear Pitch
(158.25
(158.25
(158.25
(158.25
(158.25
/128
/128 0.26 µrad (0.054 arc-sec)
/128 µrad (0.08 arc-sec)
/128 0.24 µrad (0.05 arc-sec) µrad (0.04 arc-sec) drawing Custom Custom Custom
/128 0.24 µrad (0.05 arc-sec) µrad (0.04 arc-sec) drawing Custom Custom Custom
Beam Separation Reflector Reflector Weight Mount Used
Integral Integral
drawing Custom Custom Custom
drawing Custom Custom Custom
When used with Agilent 5527B Laser Positioning Transducer System, 10885A Axis Board, 10895A Laser Axis Board VMEbus.
System resolution improved factor when using Agilent 10889B Servo Axis Card. 10897B improves system resolution factor
Specifications throughout this document describe warranted performance. Supplemental characteristics (indicated TYPICAL AVERAGE) intended provide nonwarranted performance information useful general application.
Example Configurations
Example 1-Single Axis System Servo-Track Writing
5517B/C Laser Head 10705A Single Beam Interferometer 10704A Reflector bare corner cube) 10780C/F Receiver 10710A Optics Mount
10704A
10705A
5517A/B
10780C/F
Example 2-Multiaxis System Coordinate Measuring Machine
13321314635517B Laser Head 10702A Linear Interferometer 10703A Rttroreflector 10700A Beamsplitter 10701A Beamsplitter 10707A Beam Bender 10717A Wavelength Tracker 10780C/F Receiver 10710A Adjustable Mount 10711A Adjustable Mount
10702A 10707A
10780C/F
10702A
10703A
10701A 10707A 10780C/F
10703A
10780C/F 10700A
10717A 10707A
10703A
10700A 10780C/F
10707A
10702A
5517B
Example 3-Multiaxis System Precision Stage
5517C Laser Head 10701A Beam Splitter 10706B High-Stability Plane Mirror Interferometer 10707A Beam Bender 10717A Wavelength Tracker 10780C/F Remote Receiver 10710A Optics Mount 10711A Optics Mount
10706B X-axis 10780C/F 10701A 10780C/F 10717A 10701A 10707A 5517C
10706B
10706B
Y-yaw 10780C/F 10701A
Y-axis 10780C/F
Multiaxis System Precision Stage Used Fabrication
Example Configurations, continued
Example 4-Three-axis Stage Laser Positioning System with Column Referencing
5517C Opt. 3-mm Laser Head 10701A Beam Splitter 10707A Beam Splitter 10719A One-axis Differential Interferometer 10721A Two-axis Differential Interferometer 10780F Remote Receiver 10710A Adjustable Mount 11115517C Opt. 10701A
10707A 10707A Column 10780F Remote Receivers
10780F Remote Receiver 10719A
10721A Multiaxis Stage
Example 5-Five-axis Stage Laser Positioning System
112265517C Opt. 9-mm Laser Head 10725A 9-mm Laser Beam Splitter 10726A 9-mm Laser Beam Bender 10736A Three-axis Interferometer 10780F Remote Receiver
10725A
5517C Opt. 10736A
10726A
Fiber-optic Receivers
Fiber-optic Receivers
Multiaxis Stage
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Product specifications descriptions this document subject change without notice. Copyright 1995, 2000 Agilent Technologies Printed U.S.A. 11/00 5964-6190E
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