System Specifications Environmental Operating Temperature: 40°C 1

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System Specifications Environmental Operating Temperature: 40°C 1

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Agilent 5529A Dynamic Calibrator
System Specifications
Environmental Operating Temperature: 40°C 104°F) Optics temperature must stabilized ±2°C achieve accuracy specifications. Power Requirements Laser Head: Vac, Vac, (during warmup) (after warmup) Electronics (from PC): Vdc,15 Sample Rate Depends computer type setup. Typical rates listed below. Computer Typical rate 486/33 486/66 Pentium kHz1
Start Timer: invoked from computer (not from remote).
Laser Characteristics Type: Helium-Neon with automatically tuned Zeeman-split two-frequency output Warm-up Time: Less than minutes minutes typical) Vacuum Wavelength: 632.991354 Wavelength Accuracy: ±0.1 (±0.02 measured wavelength calibrated with factory calibration, Option UK6) Short Term hour) Wavelength Stability: ±0.002 typical Long Term (Lifetime) Wavelength Stability: ±0.02 typical Output Power: Class Laser Product) Beam Diameter: (0.24 Beam Centerline Spacing: 11.0 (0.44 (input output aperture) Safety Classification: Class Laser Product conforming U.S. National Center Devices Radiological Health Regulations 21CFR 1040.10 1040.11.
CAUTION
LASER LIGHT
STARE INTO BEAM MAXIMUM OUTPUT: PULSE SPEC: continuous wave LASER MEDIUM: helium neon CLASS LASER PRODUCT
Linear Distance, Diagonal, Velocity Measurement Specifications
Angular Measurement Specifications
Measurement Range (130 with Linear Optics; (260 with Long Range Option Linear Distance Diagonal Measurement Accuracy
Temperature Range, [°F] ±0.5° [59° 77°] [32° 104°] 10751C/D Sensor ±1.5 ±1.7 ±3.0 ppm* Vacuum ±0.1 (±0.02) ±0.1 (±0.02) ±0.1 (±0.02)
Angle Measurement Accuracy ±0.2% displayed value ±0.05 arc-seconds meter distance traveled linearly moving optic. Measurement Type Pitch Angle Measurement Resolution 0.05 arc-seconds (standard) 0.005 arc-seconds (extended) Measurement Range ±10° (rotated about base optic) ±20° (rotated about center optic) Maximum Distance Between Laser Head Reflector
Typical accuracy ±1.0 with month calibration cycle Sensor.
Vacuum accuracy ±0.02 laser head calibrated MIL-STD 45662A.
Velocity Measurement Accuracy
Sample Rate (Hz) mm/s [0.015 +1)]% displayed value Velocity
Linear Distance Diagonal Measurement Performance
Maximum Axis Velocity Optics Linear Optics (10766A) Plane Mirror Optics (10706A/B)* High Resolution Plane Mirror Optics (10716A)* Standard Extended Resolution Resolution (0.4 µin) (0.2 µin) (0.04 µin) (0.02 µin) 5519A ±0.7 (±28 in/s) ±0.35 (±14 in/s) 5519B nm/s (±40 in/s) ±0.5 (±20 in/s)
(0.1 µin)
0.25 (0.01 µin)
±0.18 in/s)
±0.25 (±10 in/s)
Requires 10724A Plane Mirror Reflector. Since alignment these optics
much more sensitive than linear optics, linear optics recommended general use. Aperture distance 10716A 12.7 whereas 5519A
Angular Position Measurement Specifications
Measurement Type Rotary indexing tables spindles
Flatness Measurement Resolution (per step)
Footspacing Dimension 50.8 101.6 152.4
Resolution 0.03 micron (1.0 µin) 0.05 micron (2.0 µin) 0.08 micron (3.0 µin)
Indexing Mode (This zero-reference measurement using 55290A Angular Position Measurement Kit.) Accuracy: band +0.2% displayed reading Step Size (resolution): Range: multiple rotations partial arcs Laser Measurement Mode Accuracy: 0.2% displayed reading. Accuracy improved calibrating laser optics with indexing table (55290A). Range: ±10° Setup Requirements Travel (using machine axis, manual from zero reference) Indexing Mode (Interferometer fixture) Maximum Lift: required fixture)
Reference Plane Accuracy uncertainty surface plate flatness measurement bounded parallel planes separated values below: Metric Units Mode: 0.03 English Units Mode: 0.12 Where: length surface diagonal meters length surface diagonal feet Lateral Offset Flatness Range combination lateral offset maximum flatness deviation must displace reflector more than ±1.0 from beam path direction. Straightness Accuracy ±0.2% displayed value ±0.05 seconds meter distance traveled moving optics
Flatness Straightness Measurement Specifications
Note: Values include effects surface cleanliness operator positioning repeatability. Range: Flatness Measurement Accuracy ±0.2% displayed value ±0.05 arc-seconds meter distance traveled moving optic
Straightness Parallelism Measurement Specifications
Straightness Measurement Accuracy1 Overall Accuracy Optical Reference Accuracy Measurement Accuracy
This analogous traditional straightedge indicator method measuring straightness, where Optical Reference Accuracy corresponds straightedge accuracy, Measurement Accuracy corresponds indicator accuracy.
Optical Reference Accuracy Optical reference inaccuracy eliminated using straightedge (mirror) reversal techniques. Short Range Optics: Metric units mode: 0.15 English units mode: Long Range Optics: Metric units mode: ±0.015 English units mode: ±0.05 Where: distance travel moving optic meters distance travel moving optic feet Measurement Accuracy* Short Range Optics:
Displayed Value Temperature Range 25°C µin) ±3.5% 1,500 (400 µin) ±0.25 µin) ±0.5 µin)
Straightness Measurement Range (Orthogonal Axial Travel) ±1.5 (0.060 Axial Separation (Travel) (distance between interferometer reflector, typical, with proper alignment, 25°C): Short Range Optics: Long Range Optics:
Squareness Measurement Specifications
Squareness Measurement Accuracy Short Range Optics: Metric Units Mode: ±(1.0 arc-seconds ±0.01 English Unit Mode: ±(1.0 0.03 arc-seconds ±0.01 Long Range Optics: Metric Units Mode: ±(1.0 0.01 arc-seconds ±0.025 English Units Mode: ±(1.0 0.003 arc-seconds +0.025 Where: calculated out-of-square angle arc-seconds distance travel moving optic meters distance travel moving optic feet
40°C
Long Range Optics:
Displayed Value Temperature Range 25°C 4,000 µin) 1,500 (4,000 60,000 µin) ±2.5% ±2.5 (100 µin) ±2.5% (200 µin)
A-Quad-B Input
Differential Input Threshold ±0.5 minimum ±7.0 maximum Differential Input Impedance High-Z Input Rate >100 edge-to-edge, information rate Example: maximum speed, both must <2.5 MHz.
These specs applicable Timebase Straightness Measurements.
40°C
±7.5%
Straightness* Measurement Resolution
5519A 5519B Short Range 0.01 (0.4 µin) µin) 5518A 0.04 (1.4 µin) µin)
Long Range
Environmental Compensation
Maximum Compensation Update Rate (combined material temperature compensation) Wavelength Light (WOL) Compensation, 10751C/D Manual: Compensation factor entered keyboard Range: Automatic: Requires 10751C/D Sensor. Display pressure, temperature, relative humidity setting, computed provided display. Cable Lengths: 10751C-5 10751D-15 Operating Range Temperature: 40°C 104°F) Absolute Pressure: 517.2 775.7 mmHg psia) Heat Dissipation: typical Time Constants: Temperature: min. typical Pressure: typical
Material Temperature Compensation, 10757D/E/F Manual: User-entered keyboard Range: 50°C 122°F) Automatic: Requires Agilent 10757D/E/F Material Temperature Sensors. Display individual readings average connected sensors provided display. 10757D/E/F Material Temperature Sensor: Integrated Circuit type. Mounted remote, immersible "button" with magnetic base. Cable Lengths: 10757D-5 10757E-15 10757E-25 Maximum Sensor Error month calibration intervals) ±0.35°C, ±0.10°C with calibration matching Agilent 10886A. Time Constant: typical Material Expansion Coefficient: Range: -100.0 +100.0 manually entered.
Personal Computer
Agilent 5529A requires PC-compatible computer with following minimum configuration: 486/33 processor 11/2 slots 31/2" floppy disk drive Windows® and/or Windows faster, more powerful computer enhances 5529A operation.
System Component Dimensions Weights
Power requirements: Included: switching mode power supply input 100-240V, 47-63Hz,1A Environmental: Operating Range: 0-40°C Minimum Requirements: compatible Computer with Windows Windows 2000 Installed 64Mb CD-ROM Drive version 1.1, 12Mb/sec internal port note: adapters supported Dedicated Host Agilent 10887A Calibrator Board 10886A Compensation Board Only!! Shipping Weight: more information USB, visit http://www.usb.org/index.html.
Agilent 55292A Expansion Module
Head/Tripod
168.0 192.0 (6.61 (7.56 360.0 (14.17 1.25 thread places) 118.0 (4.65
CrossAdjustable Slide Minimum 1650 Maximum
92.7 (3.65
479.0 (18.86
44.0 (1.73 55.0 (2.17
Wt.: 17.6
(27.25 Max. Radius Min. (13.0
Agilent 5519A/B Laser Head
Agilent 10753B laser Tripod
Linear Optics
Captive Screw Places) 40.0 (1.57 Places) (0.5 40.0 (1.57 Aperture 20.0 (0.79
Angular Optics
Places)
INTER
30.0 (1.18
40.0 (1.57
10770A
1A0101
40.0 (1.57
25.0 (0.98
30.0 (1.18
72.6 (2.86 30.0 (1.18 Aperture 18.0 (0.71 Places)
Agilent 10767A Linear Retroreflector
90.0 (3.54 50.0 (1.97
30.0 (1.18 (1.3
30.0 (1.18
30.0 (1.18
Agilent 10770A Angular Interferometer
Captive Screw Places) 19.0 (0.75 11.7 (0.46
1077
Places)
107.8 (4.24
Places)
1A0101
Front
Side
40.0 (1.57
40.0 (1.57
Agilent 10785A Height Adjuster/Post, 10784A Base
32.61 (1.284 72.6 (2.86 30.0 (1.18
Places) 30.0 (1.18
INTERF
40.0 (1.57
27.0 (1.06 30.0 (1.18 40.0 (1.57
10766A
30.0 (1.18
ETER
(1.5
30.0 (1.18 65.0 (2.56 5.36 (1.2 Note Dotted outline shows possible 10767A retroreflector mounting positions.
Agilent 10771A Angular Reflector
Agilent 10766A/10767A Interferometer Combination
Flatness Accessories
63.5 (2.50 50.8 (2.00 152.5 (6.00 1.65 (6.50 114.3 (4.50 101.6 (4.00 Pattern Match 10771A 0.5) Clearance Holes
50.0 (1.97 39.0 (1.53 50.0 (1.97 (1.5
50.0 (1.97
12.7 (0.50
Agilent 10759A Foot Spacing
30.0 (1.18 50.0 (1.97
Match 10770A Clears
30.0 (1.18 110.0 (4.33
Mirror Turns
12.2 (0.48
45.7 (1.80
(1.5
Agilent 10773A Flatness Mirror
Straightness/Squareness Optics
30.0 (1.18 40.0 30.0 (1.57 (1.18 40.0 (1.57 Aperture 20.0 (0.79 Places) Captive Screw Places) (1.2 w/Mount
Places)
40.0 (1.57
Agilent 10772A Tuning Mirror
30.0 (1.18 30.0 (1.18
40.0 (1.57)
32.0 (1.26 32.0 (1.26 Aperture (0.31
1077
Places)
25.0 (0.98 110.0 (4.33 Aperture 98.0 (0.31 3.66
40.0 (1.57
Places) 21.0 (0.83
1A0101
20.0 (0.79
Weight: (28.2 Angular Reflector
Weight: (5.8 Straightness Interferometer
Agilent 10774A Short Range Straightness Optics/10775A Long Range Straightness Optics
90.0 (3.54) 36.0 (1.42) 18.0 (0.71) 51.0 (2.01) 25.5 (1.00) 11.0 C'Sink (6H) Thru 55.0 (2.17) 38.0 (1.50) 19.1 Thru (.75 Dia)
Aperture 63.5 (2.5 76.2 (3.00 Clears Places) (0.82 99.1 (3.90
86.2 (3.39
Agilent 10776-67001 Straightness Retroreflector
11.7 (0.46
Agilent 10776A Straightness Mount
Straightness/Squareness Optics, continued
Places) 49.5 (1.95 49.5 (1.95 145.0 (5.71
OPTICAL SQUARE 10777A
139.6 (5.50)
(0.31 Places)
20.0 (0.79)
(0.37) 27.5 (1.08) 29.3 (1.15)
75.5 (1.26)
32.0 (1.26)
15.0 (0.59)
133.5 (5.26)
49.5 (1.95
71.0 (2.80 Places) 14.0 (0.55 Places)
154.0 (6.06)
15.0 (0.59)
28.0 (1.10 Places) 50.9 (2.01 145.0 (5.71 43.0 (1.69
36.5 (1.44)
(8.9 w/Mount
20.0 (0.70)
20.0 (0.70) 32.0 (1.26) 77.0 (3.03)
12.0 (0.47)
20.0 (0.70)
Agilent 10777A Optical Square
67.0 (2.64)
59.5 (2.34)
20.0 (0.70)
Agilent 10777-20007 Optical Square Base
150.0 (5.91 110.0 (4.33 Places) 1/4-20 English Thread Places) Chamfer Both sides Part
10.0 (0.39
10.0 (0.39
48.0 (1.89
48.0 (1.89
(0.19
35.0 (1.38 Thru Places)
14.5 (0.57 55.5 (2.19
70.0 (2.76 2Places 90.0 (3.54
65.3 (2.57
10.4 (0.41 Places)
10.0 (0.39
29.3 (1.15 65.0 (2.56 100.7 (3.96 130.0 (5.12
10.8 Thru C-Sink 11.8 Both Sides Places) Thru Places)
10.0 (0.39
Agilent 10768-20214 Base Large
40.00 (1.57 (0.20 20.0 (0.79 (0.20 30.0 (1.18
30.0 (1.18 Thru C'Bore 25.70 Places) (1.01 20.0 (0.79 40.00 (1.57 62.4 (2.46
Thru Places) 20.0 (0.79 98.0 (3.86 108.6 (4.28
58.0 (2.28
26.4 (1.04
48.0 (1.89
(0.31 17.7 (0.70
From Agilent 10768A/10769A Measurement
Agilent 10769B Turning Mirror (Base Block Only)
Agilent 55290A Angular Position Measurement
equally spaced 6.125 B.C. Places) 10-32 equally spaced 1.750, 2.750 4.750 B.C. Places)
16.00 (0.63 4.90 (0.19 43.20 32.00 (1.70 (1.26 90.4 (3.56 82.49 (3.25 98.3 (3.87 41.24 (1.62 6.00 (0.24 31.20 (1.23
69.85 FLAT (2.75
3.38
103.78 (4.09 66.43 (2.62 52.21 (2.06
35.46 (1.40 7.92 (0.31
139.70 (5.50 54.15 (2.25
Rotary Indexing Table
9.11 (0.36
Fixture, Angle Position Measurement
50.80 deep (2.00 0.05
1/4-20 thru equally spaced apart
171.5 (6.75
38.10 (1.50
73.0 (2.87 (0.34 thru 9.505 (0.37 press item (0.25
63.5 (2.50
171.5 (6.75
73.0 (2.87
Adapter Plate
Flanged Shaft
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Product specifications descriptions this document subject change without notice. Copyright 1997, 2001 Agilent Technologies Printed U.S.A. March 2001 5964-9307E

System Specifications Environmental Operating Temperature: 40°C 1

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