Pressure High Performance Pressure Constant Current Constant Voltage D
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PRESSURE SILICON
Pressure High Performance Pressure Constant Current Constant Voltage Drive Cost High Millivolt Output
5103
GENERAL DESCRIPTION
5103 silicon micromachined pressure sensing chip. implanted piezoresistive structure forms open Wheastone bridge. Using same layout these devices available full-scale ranges from ideal high volume applications. Provided form, silicon dice bonded pyrex socle that measurement element mounted ceramic substrates part system. 5103 used gage pressure measurement. dice probed, inked diced, shipped tape waffle packs.
APPLICATIONS
Flow Level Detection Instrumentation HVAC Analysis
LAYOUT SCHEMATIC
Layout
3.30 2.50 1.50 +Vexc1 Substrat Contact -Sig
Schematic
+Vexc +Vexc1
Side View
3.15 3.60
-Sig +Sig
-Sig +Vexc +Vexc +Sig -Vexc -Vexc1 0.875 1.25 0.12 0.12 0.40 0.50
-Vexc
-Vexc1
NOTE: Dimensions
analog microelectronics
Analog Microelectronics GmbH Fahrt 55124 Mainz Internet: http://www.analogmicro.de Phone: (0)6131/91 Fax: (0)6131/91 E-Mail: info@analogmicro.de
April
PRESSURE SILICON
CHARACTERISTICS
parameters measured excitation room temperature (unless otherwise specified) Parameter Excitation Voltage Excitation Current Full-Scale Span1) hPa) hPa) (100 hPa) (200 hPa) Offset Linearity2) Span
5103
Min. -0.3
Typ. ±0.1
Max. 10.0 +0.3
Units %FS/100°C %FS/100°C %FS/100°C
Offset
Resistance Bridge Impedance Response Time Proof Pressure Burst Pressure
Rated Pressure Rated Pressure
Operating Temperature Storage Temperature NOTES:
Measured 5.0V constant voltage excitation Best straight line (BFSL); linearity ±0.5% (max.) Measured from 70°C Burst Pressure excess when topside pressured
ORDERING INFORMATION
Pressure Range hPa) hPa) (100 hPa) (200 hPa) Pressure Type Gage Model Number Pressure Type
AM5103-008-G
Pressure Range
Analog Microelectronics GmbH reserves right make changes products specifications without notice.
analog microelectronics
April
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