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MXA6500E power consumption: typical 2mA@3V Resolution better than


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Profile, Consumption ±0.5 Dual Axis Accelerometer with Absolute Analog Outputs
MXA6500E
power consumption: typical 2mA@3V Resolution better than milli-g Dual axis accelerometer fabricated monolithic CMOS chip mixed signal processing moving parts loose particle issues >50,000 shock survival rating 1.55mm package 2.7V 3.6V single supply continuous operation Ultra initial Zero-g Offset adjustment needed outside
TEMP Internal Oscillator VREF Temperature Sensor TEMP Heater Control Coarse Gain Adj. Fine Gain Adj. Connection Vref Pass Buf. Filter Connection
aixs Coarse Gain Adj.
Temp Comp.
Vref
Xout
TEMP Fine Gain Adj. Temp Comp.
aixs Acceleration Sensor
Pass Buf. Filter
Yout
CLKTEMP
APPLICATIONS
Tilt motion sensing cost-sensitive applications Smart handheld devices Computer security Input devices Pedometers activity monitors Gaming controllers Toys entertainment products GENERAL DESCRIPTION MXA6500E cost; dual axis accelerometer fabricated standard, submicron CMOS process. complete sensing system with on-chip mixed signal processing. MXA6500E measures acceleration with full-scale range ±0.5 sensitivity 500mV/g 25°C. measure both dynamic acceleration (e.g. vibration) static acceleration (e.g. gravity). MXA6500E design based heat convection requires solid proof mass. This eliminates stiction particle problems associated with competitive devices provides shock survival greater than 50,000 leading significantly lower failure rate lower loss handling during assembly customer field application.
MXA6500E FUNCTIONAL BLOCK DIAGRAM
noise floor allowing signals below milli-g resolved bandwidth. MXA6500E packaged hermetically sealed lowprofile surface mount package 1.55 height). operational over -40°C +85°C temperature range.
Information furnished MEMSIC believed accurate reliable. However, responsibility assumed MEMSIC use, infringements patents other rights third parties which result from use. license granted implication otherwise under patent patent rights MEMSIC.
©MEMSIC, Inc. Turnpike St., Suite 202, North Andover, 01845 Tel: 978.738.0900 Fax: 978.738.0196 www.memsic.com
MEMSIC MXA6500E Rev.B
Page
3/22/2005
MXA6500E SPECIFICATIONS (Measurements 25°C, Acceleration unless otherwise noted; 3.0V unless otherwise
specified) MXA6500E Parameter SENSOR INPUT Measurement Range1 Nonlinearity Alignment Error2 Alignment Error Cross Axis Sensitivity3 SENSITIVITY Sensitivity, Sensitivity Change over Temperature4 ZERO BIAS LEVEL Offset Offset Offset Temperature4 NOISE PERFORMANCE Noise Density, FREQUENCY RESPONSE Bandwidth POWER SUPPLY Operating Voltage Range Quiescent Supply Current OUTPUTS PERFORMANCE Output High Voltage Output Voltage Current Turn-On Time5 TEMPERATURE RANGE Operating Range NOTES
Conditions Each Axis
±0.5
Units
±1.0 0.01 degrees degrees mV/g
Best straight line Sensor Sensor Each Axis 3.0V Delta from 25°C -40°C Delta from 25°C +85°C Each Axis 3.0V Delta from 25°C @25°C @3.0V supply @3.0V supply Source sink 3.0V-3.6V Supply @3.0V supply 2.30
1.20 -0.10 1.25 0.00 1.30 0.10 mg/°C
0.20
Guaranteed measurement initial offset sensitivity.
Alignment error specified angle between true indicated axis sensitivity. Cross axis sensitivity algebraic alignment inherent sensitivity errors.
Defined output change from ambient maximum temperature ambient minimum temperature. Output settled within ±17mg.
MEMSIC MXA6500E Rev.B
Page
3/22/2005
ABSOLUTE MAXIMUM RATINGS* .-0.5 +7.0V Supply Voltage (VDD) Storage Temperature .-65°C +150°C Acceleration .50,000
*Stresses above those listed under Absolute Maximum Ratings cause permanent damage device. This stress rating only; functional operation device these other conditions above those indicated operational sections this specification implied. Exposure absolute maximum rating conditions extended periods affect device reliability.
Description: LCC-8 Package Name Description Power Down Control Connect ground Common Connect Connect Yout Channel Output Xout Channel Output 2.7V 3.6V Ordering Guide Model Package Style LCC8 MXA6500EP RoHS compliant LCC8, Pb-free MXA6500EB
Temperature Range 85°C 85°C
THEORY OPERATION MEMSIC device complete dual-axis acceleration measurement system fabricated monolithic CMOS process. device operation based heat transfer natural convection operates like other accelerometers having proof mass. proof mass MEMSIC sensor gas. single heat source, centered silicon chip suspended across cavity. Equally spaced aluminum/polysilicon thermopiles (groups thermocouples) located equidistantly four sides heat source (dual axis). Under zero acceleration, temperature gradient symmetrical about heat source, that temperature same four thermopiles, causing them output same voltage. Acceleration direction will disturb temperature profile, free convection heat transfer, causing asymmetrical. temperature, hence voltage output four thermopiles will then different. differential voltage thermopile outputs directly proportional acceleration. There identical acceleration signal paths accelerometer, measure acceleration x-axis measure acceleration y-axis. Please visit MEMSIC website www.memsic.com picture/graphic description free convection heat transfer principle.
parts shipped tape reel packaging. Caution: (electrostatic discharge) sensitive device.
Note: MEMSIC logo's arrow indicates sensing direction device. sensing direction rotated away from direction following right-hand rule. Small circle indicates one(1)
MEMSIC MXA6500E Rev.B
Page
3/22/2005
Sensitivity (normalized)
DESCRIPTIONS This supply input circuits sensor heater accelerometer. voltage should between volts. Refer section layout fabrication suggestions guidance external parts connections recommended. COM- This ground accelerometer. This should connected ground. Xout This output x-axis acceleration sensor. user should ensure load impedance sufficiently high source/sink >100µA. While sensitivity this axis been programmed factory same sensitivity y-axis, accelerometer programmed non-equal sensitivities y-axes. Contact factory additional information.
Yout This output y-axis acceleration
Temperature
Thermal Accelerometer Sensitivity
gaming applications where game controller typically used constant temperature environment, sensitivity might need compensated hardware software. compensation this effect could done instinctively game player. applications where sensitivity changes percent acceptable, above equation approximated with linear function. Using linear approximation, external circuit that provides gain adjustment -1.1%/°C would keep sensitivity within room temperature value over +50°C range. applications that demand high performance, cost micro-controller used implement above equation. reference design using Microchip (p/n 16F873/04-SO) MEMSIC developed firmware available contacting factory. With this reference design, sensitivity variation over full temperature range (-40°C +85°C) kept below Please visit MEMSIC site www.memsic.com reference design information circuits programs including look tables easily incorporating sensitivity compensation. DISCUSSION TILT APPLICATIONS RESOLUTION Tilt Applications: most popular applications MEMSIC accelerometer product line tilt/inclination measurement. accelerometer uses force gravity input determine inclination angle object. MEMSIC accelerometer most sensitive changes position, tilt, when accelerometer's sensitive axis perpendicular force gravity, parallel Earth's surface. Similarly, when accelerometer's axis parallel force gravity (perpendicular Earth's surface), least sensitive changes tilt. Following table figure help illustrate output changes Y-axes unit tilted from +90° Notice that when axis small change output degree tilt mg), second axis large change output degree tilt. complementary nature these signals permits cost accurate tilt
sensor. user should ensure load impedance sufficiently high source/sink >100µA. While sensitivity this axis been programmed factory same sensitivity x-axis, accelerometer programmed non-equal sensitivities y-axes. Contact factory additional information. power down control pin. Pull this HIGH will accelerometer into power down mode. When part goes into power down mode, total current will smaller than 0.1uA normal operation mode, this should connected Ground. COMPENSATION CHANGE SENSITIVITY OVER TEMPERATURE thermal accelerometers display same sensitivity change with temperature. sensitivity change depends variations heat transfer that governed laws physics. sensitivity change governed following equation (and shown following figure °C): Ti3.40 Tf3.40 where sensitivity initial temperature sensitivity other final temperature with temperature values
MEMSIC MXA6500E Rev.B
Page
3/22/2005
sensing achieved with MEMSIC device (reference application note AN-00MX-007).
Accelerometer Position Relative Gravity
MEMSIC
POWER SUPPLY NOISE REJECTION capacitor recommended best rejection power supply noise (reference figure below). capacitor should located close possible device supply (VDD). capacitor lead length should short possible, surface mount capacitor preferred. typical applications, capacitor ceramic
X-Axis X-Axis Orientation Earth's Surface (deg.)
Y-Axis Change deg. tilt (mg)
17.45 17.37 17.16 16.35 15.04 12.23 8.59 5.86 2.88 1.37 0.15 Power Supply Noise Rejection
Output
Change deg. tilt (mg)
Output
1.000 0.15 0.000 0.996 1.37 0.087 0.985 2.88 0.174 0.940 5.86 0.342 0.866 8.59 0.500 0.707 12.23 0.707 0.500 15.04 0.866 0.342 16.35 0.940 0.174 17.16 0.985 0.087 17.37 0.996 0.000 17.45 1.000 Changes Tilt Y-Axes
LAYOUT FABRICATION SUGGESTIONS best solder 0.1uF capacitor directly across pin. Robust inductance ground wiring should used. Care should taken ensure there "thermal symmetry" immediately surrounding MEMSIC device that there significant heat source nearby. metal ground plane should added directly beneath MEMSIC device. size plane should similar MEMSIC device's footprint thick possible. Vias added symmetrically around ground plane. Vias increase thermal isolation device from rest PCB.
Resolution: accelerometer resolution limited noise. output noise will vary with measurement bandwidth. With reduction bandwidth, applying external pass filter, output noise drops. Reduction bandwidth will improve signal noise ratio resolution. output noise scales directly with square root measurement bandwidth. maximum amplitude noise, peak- peak value, approximately defines worst case resolution measurement. With simple pass filter, noise calculated follows: Noise rms) Noise(mg/ Bandwidth( *1.6) peak-to-peak noise approximately equal times value (for average uncertainty 0.1%).
MEMSIC MXA6500E Rev.B
Page
3/22/2005
LCC-8 PROFILE PACKAGE DRAWING
Hermetically Sealed Package Outline
MEMSIC MXA6500E Rev.B
Page
3/22/2005

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