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0.6µm 60V CMOS µ

Process ID: SG C06

0.6µm 60V CMOS µ
Process ID: SG C06
Applications
· Automotive, including 42V standard. · Printer Drivers. · DC / DC converters. · Switch-mode PSU. · Industrial. · Display Drivers. · Smart Power. · I / F to power MOS. · Communications.
Metal3 IMD2 Metal2 IMD1 Metal1 ILD Gate Field Oxide Poly2 Gate Poly ILD Metal1 Metal2 IMD1
P Substrate HV Well Formation LOCOS Field Oxidation Twin Retrograde Wells HV Source / Drain Formation HV Gate Formation LV Gate Formation Poly resistor formation (optional) N & P LDD Poly2 Resistor & Capacitor (optional) Inter Layer Dielectric Metal 1 Inter Metal Dielectric Metal 2, Inter Metal Dielectric (optional) Metal 3 Oxide / Nitride Passivation
Key Process Features
· · · · 60V fully-symmetrical CMOS. Industry standard 5V CMOS. High resistance polysilicon resistors. Zener diode for one-time programming.
Diagrams
Passivation
P-Well
N-Well
Field Oxide
Figure 2 - double poly capacitor structure
Figure 1 - MOS and 3 layer metal structure
IMD1 IMD1 Metal1 ILD Field Oxide Gate ILD Field Oxide Gate Metal1
HV-Nwell
Figure 3 - HV NMOS structure
Figure 4 - HV PMOS structure
0.6µm 60V CMOS Process µ
· · · · · · · · · · · 5V Logic layout & performance compatible with the industry standard. 5V cell library - 5.5k gates / mm2. High resistance polysilicon resistors (optional). Zener diode structure allowing for one-off programming (analogous to fuse). Double poly capacitor optional. Typical & worst-case models - BSIM3v3.1 (MOS, BJT, RES, CAP). MOS 1 / f noise characterised & included in model. Interconnect model - Diva2D. Models supported by TCAD and AC measurement. PCell component library. Diva & Dracula DRC & LVS verification decks. 5V MOS Transistors
Device VT (V) IDS (µA / µm) BVDSS (V)
Capacitors
Device Area Cap (fF / µm2)
NMOS PMOS
Poly1 - Poly2 Layout Rules
Feature
Size (µm)
60V MOS Transistors
Device VT (V) IDS (µA / µm) BVDSS (V)
NMOS PMOS
Resistors
Device
Poly1 High Res Poly1 Poly2 P-diffusion N-diffusion N-Well
1.8 2.4 1.35 2.15 0.75 0.6 7.0 1.7 2.0 1.7 2.3 1.7 2.3 NO YES
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31.Jul.01
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