Process Data Sheet PLATING PLATE 2000 NITRIDE 0.75 FIRST METAL RE
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0.5-µm HFET
Process Data Sheet
PLATING PLATE 2000 NITRIDE 0.75 FIRST METAL RESISTOR GATE ACTIVE REGION OHMIC METAL (EXCEPT VIA) SEMI-INSULATING GaAs SUBSTRATE
0.5-µm amplifier transistors 0.5-µm switch transistors 0.5-µm diodes Device passivation High-Q passives capacitors resistors GaAs resistors metal layers bridges Substrate vias Operation Communications Space Military Power amplifiers Driver amplifiers amplifiers Limiting amplifiers Transimpedance amplifiers Differential amplifiers
UNDER
0.5-µm Process Cross Section
Applications
General Description
0.5-µm Heterostructure (HFET) process depletion-mode (2-metal-interconnect) process applications through GHz. HFET characteristics provide high power, high linearity, extraordinary transconductance uniformity high breakdown voltages. Passives include thick-metal interconnect layers, precision resistors, GaAs resistors, capacitors throughsubstrate vias. capacitor-over-via process aides size compaction offers excellent grounds higher frequencies.
West Renner Road Richardson, Texas 75080
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
0.5-µm HFET
Process Data Sheet
0.5-µm HFET Process Details
Element FETs Idss capacitors Capacitors over vias resistors GaAs resistors Vias Substrate thickness sheet resistance sheet resistance density Parameter Typical Value -1.85 Units mA/mm mS/mm pF/mm2
Models Available (Noise)
Gate Pitch (µm) Gate Fingers Sizes (µm) 1200
West Renner Road Richardson, Texas 75080
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
0.5-µm HFET
Process Data Sheet
0.5-µm HFET Characteristics
West Renner Road Richardson, Texas 75080
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
0.5-µm HFET
Process Data Sheet
0.5-µm HFET Maximum Available Gain/Stable Gain (MAG/MSG) Volts, mA/mm
Application Examples
Ultra-Linear Power Amplifier TGA2801D-SG: This amplifier provides flat gain along with ultra-low distortion. also provides high output power with power consumption. This amplifier ideally suited CATV distribution systems other applications requiring high output powers extremely distortion.
West Renner Road Richardson, Texas 75080
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
0.5-µm HFET
Process Data Sheet
0.5-µm HFET Power Tuned Load Volts,
(dBm)
0.5-µm HFET Efficiency Tuned Load Volts,
(dBm)
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
West Renner Road Richardson, Texas 75080
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
0.5-µm HFET
Process Data Sheet
Prototyping Development
Prototype Wafer Option (PWO) Customer-specific masks Customer schedule wafers delivered Backside vias included (process control monitor) qualified wafers
Process Status
0.5-µm Heterostructure (HFET) fully released qualified Contact TriQuint visit more information quality reliability.
Applications Services Design Tools
Device libraries circuit elements: FETs Thin-film implanted resistors Capacitors Inductors Agilent design MASC Library Microwave Office library
Tiling GDSII stream files including (process control monitor) Design rule checking Layout versus schematic checking Engineering: On-wafer test On-wafer test Thermal analysis Yield enhancement Part qualification Failure analysis
Training
GaAs design classes: Half-day introduction upon request technical training upon request TriQuint Texas facility
Manufacturing Services
Mask making Wafer thinning Wafer dicing Substrate vias die-sort testing on-wafer testing Final visual testing
West Renner Road Richardson, Texas 75080
Semiconductors Communications, Space Military www.TriQuint.com
Specifications subject change.
Page 1/30/06
Phone: 972-994-8200 Foundry: 972-994-4545 Email: info@triquint.com
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