Airflow Sensors Microbridge Mass Airflow Series 1000/2000/30

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Airflow Sensors Microbridge Mass Airflow Series 1000/2000/30

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Airflow Sensors Microbridge Mass Airflow
Series
1000/2000/3000 Series
40000 Series
5000 Series
FEATURES State-of-the-art silicon micromachining Sensitive flows sccm SLPM Adaptable with higher flows (See Application Note page 128.) Fast response time Analog output power consumption OPERATION microbridge mass airflow sensor operates theory heat transfer. Mass airflow directed across surface sensing elements. Output voltage varies proportion mass other flow through inlet outlet ports package. specially designed housing precisely directs controls airflow across microstructure sense element. Mechanical design package allows easily mounted printed circuit boards. microbridge mass airflow sensor unique silicon chip based advanced microstructure technology. consists thin-film, thermally isolated bridge structure containing heater temperature sensing elements. bridge structure provides sensitive fast response flow other over chip. Dual sensing elements positioned both sides central heating element indicate flow direction well flow rate. Laser trimmed thick film thin film resistors provide consistent interchangeability from device next.
Repeatable response Laser-trimmed interchangeability Accurate, cost effective flow sensing In-line printed circuit board terminals Standard 0.100 (2,54mm) mounting centers Accurate sensing pressure 0.001 (.003 10mBar)
microbridge mass airflow sensor uses temperature-sensitive resistors deposited within thin film silicon nitride. They suspended form bridges over etched cavity silicon, shown below. chip located precisely dimensioned airflow channel provide repeatable flow response. Highly effective thermal isolation heater sensing resistors attained etching cavity space beneath flow sensor bridges. small size thermal isolation microbridge mass airflow sensor responsible extremely fast response high sensitivity flows. Dual Wheatstone bridges control airflow measurement provides closed loop heater control, other contains dual sensing elements. heater circuit minimizes shift ambient temperature changes providing output proportional mass flow. circuit keeps heater temperature constant differential (160°C) above ambient temperature which sensed heat-sunk resistor chip. ratiometric voltage output device corresponds differential voltage across Wheatstone bridge circuit.
APPLICATIONS Damper control heating, ventilation, conditioning systems analyzers vacuum control Process control Medical respirators ventilators Oxygen concentrators Leak detection equipment Vent hoods Anesthesia control metering chromatography
NOTICE
Dust contamination possible some applications, effects which minimized. design, dust particles that present stream will flow past chip parallel chip surface. addition, microstructure chip produces thermophoretic effect, which repels micrometer-sized dust particles away from bridge structure. Dust adherence chip edges channel surfaces prevented using simple filter. disposable fivemicron filter used series upstream side airflow device will provide adequate filtering most applications. list possible filter sources, Filter Manufacturers, page 126.
CAUTION
Series Microbridge Mass Airflow Sensors designed sense liquid flow will damaged liquid flow through sensor.
PRODUCT DAMAGE
Honeywell
Sensing Control 1-800-537-6945
1-815-235-6847 International 1-800-737-3360 Canada

Airflow Sensors Microbridge Mass Airflow Series 1000/2000/30

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