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Absolute Pressure Sensor Programmable Temperature Compensation Calibra


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KP110
Absolute Pressure Sensor Programmable Temperature Compensation Calibration On-Chip Signal Conditioning Cost Bare Version
Data Sheet Features Ratiometric analog output Programmable transfer function performed customer High accuracy over large temperature range CMOS compatible surface micromachining Bare
KP110
Specific transfer functions programmable Broken wire detection Type KP110 Ordering Code Q62705-K432 Minimum Order Quantity Wafer
Product Description KP110 miniaturized absolute pressure sensor based capacitive principle. surface micromachined with monolithic integrated signal conditioning circuit realized state-of-the-art BiCMOS technology. KP110 high precision cost critical solutions. High accuracy high sensitivity enable dedication automotive applications well consumer products. automotive field manifold pressure (MAP) barometric pressure (BAP) important parameters compute air-fuel ratio provided engine controlling spark advance optimize engine efficiency.
Data Book
2003-05
KP110
Configuration (top view die)
Figure Definitions Functions Symbol SERIAL_CLK/ PROG_VOLT DTA_IN DTA_OUT Function External clock communication/ Programming voltage Serial Serial Supply voltage Alternative ground Analog pressure signal output circuit ground potential
(GND)
VOUT
pads described shaded rows table above used during calibration only.
Data Book
2003-05
KP110
Data Semiconductor material: Silicon Surface passivation: Silicon-Nitride thickness: dimension: 4.30 3.34 metallisation: AlSiCu Size bondpads (area free passivation): Rear side metallisation chips: used rear side chip electrical connected with GND-Pad
Figure
Functional Block Diagram
Data Book
2003-05
KP110
Functional Description Digital Programming Interface KP110 digital interface wire interface consisting Data_In, Data_Out Clock. write cycle needs Clock cycles. With first rising edges Clock signal Data_In clocked into shift register. first bits interpreted register address, last data bits. address data word starting with LSB, respectively. During falling edges first Clock cycles Data_In must low. falling edge 12th Clock cycle enables write frame, this time Data_In must high. 13th Clock cycle needed internal purposes, signal Data_In ignored. Simultaneously write cycle, read cycle Data_Out performed. signal Data_Out structured same Data_In, i.e. address bits data bits. selected register reading depends content TESTREG register. first valid Data_Out appears with 13th rising edge Clock previous write frame. following figure shows timing diagram:
Figure
Timing Diagram
Data Book
2003-05
KP110
table below shows internal registers KP110. shaded registers PROM cells exist. PROM cells used permanent programming calibration data. addition registers table below table exists linearization definition analog pressure signal. This table also overlayed PROM cells. write word table first data content must written into MEMDAT register. further write cycle desired word addressed LSBs MEMCTL register. Register MEMDAT MEMCTL GLOBOFF FUSE_NR TESTREG TGAIN TOFFL TOFFQ MODEREG Function Data Selection register linearization table Global offset compensation Fuse number Selection register read cycle Temperature gain compensation (linear square) Linear temperature offset compensation Square temperature offset compensation Selection registers programming PROM
shaded registers table overlayed with PROM
Nonvolatile Memory Each PROM cell consists thin polysilicon wire located small evacuated cavity. cells called HR-fuses. order write logic HR-cell wire with current pulse. Since current reach only single HR-fuse programmed time. desired within HR-fuse register addressed register called FUSE_NR. case linearization table desired PROM register itself addressed MEMCTL-register. order program GLOBOFF, TGAIN, TOFFL TOFFQ register MODREG-register used addressing. After correct addressing PROM register fuse pulse applied requirements pulse voltage, length slew rate given electrical characteristics. exact sequences RAM/PROM reading/writing available request.
Data Book
2003-05
KP110
Calibration GLOBOFF register needed adjust sensor cell internal converter range. TGAIN, TOFFL TOFFQ registers used temperature compensation. These registers together with linearization table have programmed achieve full sensor performance. proper calibration compensation registers linearization table proposed measure sensor minimum different temperatures (e.g. pressures, depending desired pressure range. appropriate calibration sequence support sensor application group available. Maximum Ratings Parameter Supply voltage Supply voltage1) Supply current Ambient temperature Storage temperature Burst pressure Voltage DTA_IN Voltage SERIAL_CLK/ PROG_VOLT during clock mode Voltage SERIAL_CLK/ PROG_VOLT during fuse mode Symbol Limit Values min. max. 16.5 6.52) Unit
TMAX pBURST VDTA_IN VSERIAL_CLK VPROG
output peak current DTA_OUT IOHP output peak current DTA_OUT IOLP
1h@70 Reverse polarity;
Note: Stresse above those listed here cause permanent damage device. Exposure absolute maximum rating conditions extended periods affect device reliability.
Data Book
2003-05
KP110
Protection Human Body Model (HBM) tests according Standard EIA/JESD22-A114-B (covers 883D) Parameter Symbol Limit Values min. ESD-Protection VESD Pins VCC, GND, VOUT Calibration Pins max. Unit Notes
Operating Range +140 unless otherwise specified Parameter Supply voltage
Symbol
Limit Values min. max. 0.25 0.25
Unit year
Output current (pad Operating temperature Minimum rated pressure Maximum rated pressure Pressure span Lifetime
Sink Source2)
IOUT PSPAN
output sensor ratiometric supply voltage within specified range 4.50 5.50 Sink: Current into device. Source: Current driven device
Electrical Characteristics +140 unless otherwise specified Parameter Output voltage min. rated pressure1) Output voltage max. rated pressure1) Overall accuracy Ratiometricity2) Response time3)
Data Book
Symbol
Limit Values min. typ. max. 4.85 0.25 4.50 below
Unit
2003-05
VOUT, VOUT,
KP110
Electrical Characteristics (cont'd) +140 unless otherwise specified Parameter Output ripple Symbol Limit Values min. typ. max. mVpp mVpp Unit
Stabilization time4) Power time
output sensor ratiometric supply voltage within specified range 4.50 5.50 Definition:
VOUT range range 4.50 5.50 Ratiometric signal error included overall accuracy! Response time defined time incremental change output from final value when subjected specified step change pressure. Stabilization time defined time required product meet specified output voltage after pressure been stabilized.
Input SERIAL_CLK PROG_VOLT Input voltage (fuse mode) Input capacitance Input current (clock mode) Input current (fuse mode) Input voltage (clock mode) Input voltage (clock mode) Input hysteresis Input DTA_IN Input capacitance Input current Input voltage Input voltage Input hysteresis
VPROGIN CSERIAL_CLK ICKLIN IVPROG VHSERIAL_CLK VLSERIAL_CLK VCINHYST
CDTA_IN IDTA_IN VHDTA_IN VLDTA_IN VSINHYST
Data Book
2003-05
KP110
Electrical Characteristics (cont'd) +140 unless otherwise specified Parameter Symbol Limit Values min. Output DTA_OUT output voltage (IOH output voltage (IOL Timing Tolerances Clock frequency SERIAL_CLK CLKS pulse width CLKS pulse width DTA_IN setup time DTA_IN) DTA_IN hold time DTA_IN) DTA_OUT output delay time DTA_OUT) ENABLE setup time DTA_IN) ENABLE hold time DTA_IN) PROG_VOLT setup time SERIAL_CLK) PROG_VOLT hold time SERIAL_CLK) PROG_VOLT slew rate typ. max. Unit
fCLK tISU tICH tENS tENH tVPD tVPH
V/µs
Data Book
2003-05
KP110
Transfer Function sensor calibrated with linear transfer characteristic between applied pressure output signal:
VOUT
output ratiometric. gain offset calibrated. feasible transfer function KP110 example:
VOUT 5.000 (0.0106 0.32666)
With parameters following calibration adjusted:
VOUT VOUT (@VCC
Figure
Possible Transfer Function KP110
output circuit pass filter (min. .Order) with frequency greater than output circuit protected against short circuit GND.
Data Book
2003-05
KP110
Accuracy Accuracy deviation actual output from nominal output over entire pressure temperature range according figure below sources error including following: Pressure: Output deviation from target transfer function over specified pressure range. Temperature: Output deviation over temperature range. Aging during operating time error band determined continuous line through four relevant break points: Break Point (°C) Typical Accuracy (kPa)
Note: gained output signal accuracy depends largely quality mounting calibration process accomplished customer!
Figure
Overall Accuracy over Temperature
Data Book
2003-05
KP110
Application Circuit recommended, that circuit pressure sensor protected against overload voltage electro magnetic influences (like shown Figure output circuitry acts pass decoupling filter between output sensor input Note: Circuitries customer specific applications deviate from this circuitry.
Figure
Typical Application Circuit KP110 Range Typ. value
Component
Data Book
2003-05

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