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Veeco Instruments

Veeco creates process equipment that enables technologies for a cleaner and more productive world. We design, manufacture and market thin film equipment aligned with global trends, such as energy efficiency, mobility and the internet-of-things. We develop highly differentiated, best-in-class equipment for critical high-tech performance steps in thin film processing. - thin film equipment

MOCVD Systems, Precision Surface Processing Systems, MBE Technologies, Gas & Vapor Delivery Systems, Ion Beam Systems & Sources, Chemical Vapor Deposition, Diamond-Like Carbon, Physical Vapor Deposition, Dicing Systems, Lapping Systems, Enabling lower cost-of-ownership service solutions, Improving system up-time and productivity, Targeting efficiency and yield improvement, Delivering parts quickly and efficiently, Optimizing system performance, Advanced Packaging, Data Storage, LED, Materials Science, MEMS, Optical, Power Electronics, Semiconductor, RF, & more.

DATASHEET PDF or ZIP
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch - Advanced Packaging 1774aa29cd2a51be3ae20d1ab230f966 : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
Detailed Explanation Of The EEO Is The Law Poster (English) D32be4fa52a5ba5127b54db7e087798c : Detailed explanation of the EEO is the Law Poster (English) (PDF)
Introducing The New TurboDisc EPIK700 MOCVD System - LED Ce2f2d6b9305a18efc8c6e17fa4aef50 : Introducing the New TurboDisc EPIK700 MOCVD System (PDF)
Chip Scale Review - Advances In Photoresist Stripping - Advanced Packaging 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
TurboDisc GaN MOCVD System Comparison - LED Dfd2ce14d251c4e7cbc32ab16f42a489 : TurboDisc GaN MOCVD System Comparison (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study - Advanced Packaging 6c85fa1bad35f91ec3d242c0a9d8ca4f : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
GENxplor R&D MBE System Data Sheet - Materials Science 5ff68c28300e8ec266da97cd3403f191 : GENxplor R&D MBE System Data Sheet (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - MEMS 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Detailed Explanation Of T He EEO Is The Law Supplemental Poster F8f7e3c6a35c178fee873cc6bdcf37bd : Detailed explanation of t he EEO is the Law Supplemental Poster (PDF)
TurboDisk EPIK®700 GaN MOCVD System - LED 4fc8f4d8569ce63940b91ec5f16a7f98 : TurboDisk EPIK®700 GaN MOCVD System (PDF)
Veeco PROPEL Power GaN MOCVD System - Power Electronics Cd5ee82689d0f787e02d40131afb37ed : Veeco PROPEL Power GaN MOCVD System (PDF)
Ion Beam Sputtering Deposition Of Fluoride Thin Films For 193 Nm Applications - Optical Cc2886fd9ed0dd1e975b94ebc1ecae90 : Ion Beam Sputtering Deposition of Fluoride Thin Films for 193 nm Applications (PDF)
Oxygen Resistant Components - Materials Science B28cbd6633c11142021dad288517e059 : Oxygen Resistant Components (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - MEMS 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
TurboDisc K465i GaN MOCVD Data Sheet - LED 1aaafedf15e42b02cde1c4ce2ab50ac8 : TurboDisc K465i GaN MOCVD Data Sheet (PDF)
Accelerating Silicon Carbide Power Electronics Devices Into High Volume Manufacturing With Mechanical Dicing System Db255f6c3a467f19a7fb42a01b192dfa : Accelerating Silicon Carbide Power Electronics Devices into High Volume Manufacturing with Mechanical Dicing System (PDF)
Pay Transparency Nondiscrimination Provision Be5b96d236a7e100d2af4c0d833a072b : Pay Transparency Nondiscrimination Provision (PDF)
Gas Source Delivery Solutions - Materials Science 04fb4083f6c2ec42f8df91544628fe24 : Gas Source Delivery Solutions (PDF)
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch - MEMS 1774aa29cd2a51be3ae20d1ab230f966 : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
P MOCVD System Data Sheet - LED 436f23f511a01a74678b74f3dde40b4c : P MOCVD System Data Sheet (PDF)
Solutions For Carbon Doping - Materials Science 6447cae1dc4dd1979745dadb0433ea9f : Solutions for Carbon Doping (PDF)
Improvement Of Dopany Concentration Control With Acoustic Control System For B-SiGe Epitaxy Deposition - Semiconductor C67cdf58bd4c1e19d60b7bd12a61a741 : Improvement of Dopany Concentration Control with Acoustic Control System for B-SiGe Epitaxy Deposition (PDF)
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch 1774aa29cd2a51be3ae20d1ab230f966 : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
Chip Scale Review - Advances In Photoresist Stripping - MEMS 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
Phosphorus Recovery System - Materials Science 514fba46a7da5e111bcb1e5f982d572a : Phosphorus Recovery System (PDF)
Apex Gas Mixing Solution - Semiconductor E3af60a66765bc7706a90fc413e6b2e4 : Apex Gas Mixing Solution (PDF)
Chip Scale Review - Advances In Photoresist Stripping 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study - MEMS 6c85fa1bad35f91ec3d242c0a9d8ca4f : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
Ammonia Resistant Components - Materials Science C502b0bb16a2d94be3027afe7361c8d6 : Ammonia Resistant Components (PDF)
WaferStorm Data Sheet - Semiconductor 229aee653a30dd829eb4520d44c955f7 : WaferStorm Data Sheet (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study 6c85fa1bad35f91ec3d242c0a9d8ca4f : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
Automated Valve Positioner - Materials Science 989a0d36580d441876689a8bc128e252 : Automated Valve Positioner (PDF)
WaferEtch Data Sheet - Semiconductor 1a3cf26b60895704680f11695413afb2 : WaferEtch Data Sheet (PDF)
DC Power Supply With PID Temperature Controller - Materials Science Ebf15a2e7c3d7c33cd91fa982fd9150b : DC Power Supply with PID Temperature Controller (PDF)
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch - Semiconductor 1774aa29cd2a51be3ae20d1ab230f966 : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
SMC-II Growth Stage Positioner - Materials Science 72c506e4143046e8ac778bd036c62249 : SMC-II Growth Stage Positioner (PDF)
Low Ripple Notch Filter Designs Using Apodized Thickness Modulation - Optical Bf3c1e298b88985358c35dadf9f1a64e : Low Ripple Notch Filter Designs Using Apodized Thickness Modulation (PDF)
Chip Scale Review - Advances In Photoresist Stripping - Semiconductor 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
5cc Dual Dopant Source Data Sheet - Materials Science 8d0ba4cc9596c2c34579d58001b5a0d5 : 5cc Dual Dopant Source Data Sheet (PDF)
SPECTOR-HT Data Sheet - Optical C3fe281173ed7e4a7c06d39c2b151116 : SPECTOR-HT Data Sheet (PDF)
Nova Ultra High Temperature Substrate Heater - Materials Science 9f176b0b3fa99aac6670d77a212bf675 : Nova Ultra High Temperature Substrate Heater (PDF)
Quest OMS Data Sheet - Optical 61e190c941a5910f50bc072113ee24ab : Quest OMS Data Sheet (PDF)
P MOCVD System Data Sheet - Learn More. 436f23f511a01a74678b74f3dde40b4c : P MOCVD System Data Sheet (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study 3ce450f3cc214a68ee59f1bf4e3431e4 : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
Benefits Here. - Benefits At A Glance - Valuing Our People Ea0e8ce602c635d884002ac9733a759c : benefits here. (PDF)
Chip Scale Review - Photoresist Strip Using Advanced Single-Wafer Process Technology 03b1952068c9035b742b50b3c9e7944e : Chip Scale Review - Photoresist Strip Using Advanced Single-Wafer Process Technology (PDF)
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch B6ff4fbf28bd1912ae03b31ae111211f : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
Veeco | Compound Semiconductor Magazine Article Bdf4f975b7e6abac01b66230824ddb42 : Veeco | Compound Semiconductor Magazine Article (PDF)
Veeco | Semiconductor Today Article 7dedab27693011698192666b42150b20 : Veeco | Semiconductor Today Article (PDF)
Veeco | MOCVD Trends Driving Down LED Chip Costs 5a307018d3b082889450633597c8efea : Veeco | MOCVD Trends Driving Down LED Chip Costs (PDF)
Veeco PROPEL Power GaN MOCVD System - Propel Power GaN MOCVD System For Power Electronics Cd5ee82689d0f787e02d40131afb37ed : Veeco PROPEL Power GaN MOCVD System (PDF)
WaferStorm Data Sheet - Precision Surface Processing - WaferStorm 229aee653a30dd829eb4520d44c955f7 : WaferStorm Data Sheet (PDF)
Chip Scale Review - Advances In Photoresist Stripping - Precision Surface Processing - WaferStorm 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study - Precision Surface Processing - WaferStorm 6c85fa1bad35f91ec3d242c0a9d8ca4f : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
Ion Beam Sputtering Deposition Of Fluoride Thin Films For 193 Nm Applications - SPECTOR-HT Ion Beam Sputtering System For Optical Coating Cc2886fd9ed0dd1e975b94ebc1ecae90 : Ion Beam Sputtering Deposition of Fluoride Thin Films for 193 nm Applications (PDF)
Ion Beam Sputtering Deposition Of Fluoride Thin Films For 193 Nm Applications - SPECTOR Loadlock Ion Beam Sputtering System For Optical Coating Cc2886fd9ed0dd1e975b94ebc1ecae90 : Ion Beam Sputtering Deposition of Fluoride Thin Films for 193 nm Applications (PDF)
Ion Beam Sputtering Deposition Of Fluoride Thin Films For 193 Nm Applications - SPECTOR Ion Beam Deposition Sputtering For Optical Coating Cc2886fd9ed0dd1e975b94ebc1ecae90 : Ion Beam Sputtering Deposition of Fluoride Thin Films for 193 nm Applications (PDF)
Introducing The New TurboDisc EPIK700 MOCVD System - TurboDisc EPIK 700 GaN MOCVD System For LED Production Ce2f2d6b9305a18efc8c6e17fa4aef50 : Introducing the New TurboDisc EPIK700 MOCVD System (PDF)
Low Ripple Notch Filter Designs Using Apodized Thickness Modulation - SPECTOR-HT Ion Beam Sputtering System For Optical Coating Bf3c1e298b88985358c35dadf9f1a64e : Low Ripple Notch Filter Designs Using Apodized Thickness Modulation (PDF)
Low Ripple Notch Filter Designs Using Apodized Thickness Modulation - SPECTOR Ion Beam Deposition Sputtering For Optical Coating Bf3c1e298b88985358c35dadf9f1a64e : Low Ripple Notch Filter Designs Using Apodized Thickness Modulation (PDF)
Low Ripple Notch Filter Designs Using Apodized Thickness Modulation - SPECTOR Loadlock Ion Beam Sputtering System For Optical Coating Bf3c1e298b88985358c35dadf9f1a64e : Low Ripple Notch Filter Designs Using Apodized Thickness Modulation (PDF)
TurboDisc GaN MOCVD System Comparison - TurboDisc EPIK 700 GaN MOCVD System For LED Production Dfd2ce14d251c4e7cbc32ab16f42a489 : TurboDisc GaN MOCVD System Comparison (PDF)
Ion Beam Sputtering Deposition Of Fluoride Thin Films For 193 Nm Applications - SPECTOR Large Area Ion Beam Deposition System For Optical Coating Cc2886fd9ed0dd1e975b94ebc1ecae90 : Ion Beam Sputtering Deposition of Fluoride Thin Films for 193 nm Applications (PDF)
Apex Gas Mixing Solution - Apex Gas Mixing System E3af60a66765bc7706a90fc413e6b2e4 : Apex Gas Mixing Solution (PDF)
TurboDisk EPIK®700 GaN MOCVD System - TurboDisc EPIK 700 GaN MOCVD System For LED Production 4fc8f4d8569ce63940b91ec5f16a7f98 : TurboDisk EPIK®700 GaN MOCVD System (PDF)
Low Ripple Notch Filter Designs Using Apodized Thickness Modulation - SPECTOR Large Area Ion Beam Deposition System For Optical Coating Bf3c1e298b88985358c35dadf9f1a64e : Low Ripple Notch Filter Designs Using Apodized Thickness Modulation (PDF)
SPECTOR-HT Data Sheet - SPECTOR-HT Ion Beam Sputtering System For Optical Coating C3fe281173ed7e4a7c06d39c2b151116 : SPECTOR-HT Data Sheet (PDF)
Improvement Of Dopany Concentration Control With Acoustic Control System For B-SiGe Epitaxy Deposition - Piezocon Gas Concentration Sensor C67cdf58bd4c1e19d60b7bd12a61a741 : Improvement of Dopany Concentration Control with Acoustic Control System for B-SiGe Epitaxy Deposition (PDF)
Quest OMS Data Sheet - SPECTOR-HT Ion Beam Sputtering System For Optical Coating 61e190c941a5910f50bc072113ee24ab : Quest OMS Data Sheet (PDF)
Veeco | Gas Mixing Control And Reproducibility 83be7e455336bcc0b35457c5c2862251 : Veeco | Gas Mixing Control and Reproducibility (PDF)
WaferEtch Data Sheet - Precision Surface Processing - WaferEtch 1a3cf26b60895704680f11695413afb2 : WaferEtch Data Sheet (PDF)
Accelerating Silicon Carbide Power Electronics Devices Into High Volume Manufacturing With Mechanical Dicing System - Optium ADS-800 Advanced Dicing System Db255f6c3a467f19a7fb42a01b192dfa : Accelerating Silicon Carbide Power Electronics Devices into High Volume Manufacturing with Mechanical Dicing System (PDF)
Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch - Precision Surface Processing - WaferEtch 1774aa29cd2a51be3ae20d1ab230f966 : Veeco PSP White Paper: Wet Etch TSV Reveal Process More Cost Effective Than Dry Etch (PDF)
Chip Scale Review - Advances In Photoresist Stripping - Precision Surface Processing - WaferEtch 9e9d96b6dae289f033ef365b63dc81f5 : Chip Scale Review - Advances in Photoresist Stripping (PDF)
Silicon Semiconductor - Wet Beats Dry In 3D Backside Process Study - Precision Surface Processing - WaferEtch 6c85fa1bad35f91ec3d242c0a9d8ca4f : Silicon Semiconductor - Wet Beats Dry in 3D Backside Process Study (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - NEXUS IBE-420i Ion Beam Etch System 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - NEXUS IBE-420Si Ion Beam Etch System 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - NEXUS IBE-420i Ion Beam Etch System 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
Quest OMS Data Sheet - Quest Broadband Optical Monitor For Optical Coating Manufacturers 61e190c941a5910f50bc072113ee24ab : Quest OMS Data Sheet (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - NEXUS IBE-420Si Ion Beam Etch System 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - NEXUS IBE-350Se Ion Beam Etch System 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - NEXUS IBD Ion Beam Deposition System 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Etch, Deposition, And Metrology Options For Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production - NEXUS IBE-350Si Ion Beam Etch System 5ca0a0fa19e21ffd1b9ba3d7704f1ff3 : Etch, Deposition, and Metrology Options for Cost-Effective Thin-Film Bulk Acoustic Resonator (FBAR) Production (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - NEXUS IBE-350Se Ion Beam Etch System 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - NEXUS IBD Ion Beam Deposition System 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
Advanced Sensor Fabrication Using Integrated Ion Beam Etch And Ion Beam Deposition Processes - NEXUS IBE-350Si Ion Beam Etch System 172c705b81647493fd285a986676e08e : Advanced Sensor Fabrication Using Integrated Ion Beam Etch and Ion Beam Deposition Processes (PDF)
GENxplor R&D MBE System Data Sheet - GENxplor™ R&D Molecular Beam Epitaxy (MBE) System 5ff68c28300e8ec266da97cd3403f191 : GENxplor R&D MBE System Data Sheet (PDF)
Nova Ultra High Temperature Substrate Heater - GENxplor™ R&D Molecular Beam Epitaxy (MBE) System 9f176b0b3fa99aac6670d77a212bf675 : Nova Ultra High Temperature Substrate Heater (PDF)
Veeco Launches EPIK 700 MOCVD System To Accelerate Adoption Of Solid-State Lighting EPIK700-Introduction-Presentation V001 W2gxqb : Veeco Launches EPIK 700 MOCVD System to Accelerate Adoption of Solid-State Lighting (PDF)

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