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KLA-Tenco

KLA-Tencor continues to serve the semiconductor equipment industry and also a number of other industries, including the light emitting diode (LED) and data storage, as well as general materials research. With a comprehensive portfolio of yield management products, systems, services, software and expertise, KLA-Tencor helps nanoeletronics manufacturers manage yield throughout their fabrication process—from research and development to final volume production. - semiconductor equipment industry

Chip Manufacturing, Wafer Manufacturing, Reticle Manufacturing, Data Storage Media/Head Manufacturing, LED Manufacturing, Compound Semiconductor Manufacturing, MEMS Manufacturing, Surface Profilometry and Metrology, Certified Used Equipment, Product Glossary, & more.

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MEDIA CENTER Klat Fact-sheet Simplified Chinese : MEDIA CENTER (PDF)
Klat Fact-sheet Japanese - MEDIA CENTER Klat Fact-sheet Japanese : Japan (PDF)
KLAT Fact-Sheet V8 - Print Version (US) - Fact Sheet KLAT Fact-Sheet V8 : Print Version (US) (PDF)
Technology Drive Map - Technology Drive Campus Map - Offices Maps Technology Drive Map : Technology Drive Campus Map (PDF)
Fact Sheet08 Taiwan 012009 - Print Version (Taiwan) Fact Sheet08 Taiwan 012009 : Print Version (Taiwan) (PDF)
Fact Sheet KLA-Tencor Fact Sheet 08032010 : Fact Sheet (PDF)
Corporate Facts Klat Fact-sheet Simplified Chinese : Corporate Facts (PDF)
Klat Fact-sheet Japanese - Corporate Facts Klat Fact-sheet Japanese : Corporate Facts (PDF)
Klat Fact-sheet Korean - Corporate Facts Klat Fact-sheet Korean : Corporate Facts (PDF)
Corporate Facts Klat Fact-sheet V8 Traditional Chinese : Corporate Facts (PDF)
Klat Fact-sheet Hebrew - Corporate Facts Klat Fact-sheet Hebrew : Corporate Facts (PDF)
ICOS T640 Brochure ICOS T640 Brochure (PDF)
KLAT Trifod T830 V8 FINAL - ICOS T830 Brochure KLAT Trifod T830 V8 FINAL : ICOS T830 Brochure (PDF)
Legal PDF : Legal (PDF)
SensArray Wafer Level Metrology Overview - In Situ Process Monitoring PDF : SensArray Wafer Level Metrology overview (PDF)
Implant Process Monitoring - Implant And Wet PDF : Implant Process Monitoring (PDF)
Wet Application Process Monitoring - Implant And Wet PDF : Wet Application Process Monitoring (PDF)
Advanced Metrology Portfolio - Korea PDF : Advanced Metrology Portfolio (PDF)
Mask Inspection Portfolio - Korea PDF : Mask Inspection Portfolio (PDF)
Advanced Inspection Portfolio July 2016 (Korea) PDF : Advanced Inspection Portfolio July 2016 (Korea) (PDF)
Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Korean) PDF : Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Korean) (PDF)
5D Portfolio Archer500LCM SpectraFilm Press Release Feb 2015 (Korean)) PDF : 5D Portfolio Archer500LCM SpectraFilm Press Release Feb 2015 (Korean)) (PDF)
5D Portfolio Press Release (Korean) PDF : 5D Portfolio Press Release (Korean) (PDF)
InspectionReviewPortfolio Press Release (Korean) PDF : InspectionReviewPortfolio Press Release (Korean) (PDF)
TeronSL650 Press Release (Korean) PDF : TeronSL650 Press Release (Korean) (PDF)
Advanced Metrology Portfolio - Taiwan PDF : Advanced Metrology Portfolio (PDF)
Mask Inspection Portolfio - Taiwan PDF : Mask Inspection Portolfio (PDF)
Advanced Inspection Portfolio July 2016 (Traditional Chinese) - Taiwan PDF : Advanced Inspection Portfolio July 2016 (Traditional Chinese) (PDF)
Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Traditional Chinese) - Taiwan PDF : Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Traditional Chinese) (PDF)
5D Portfolio Archer500LCM SpectraFilm Press Release Feb 2015 (Traditional Chinese) - Taiwan PDF : 5D Portfolio Archer500LCM SpectraFilm Press Release Feb 2015 (Traditional Chinese) (PDF)
1xnm Inspection Portfolio (Traditional Chinese) - Taiwan PDF : 1xnm Inspection Portfolio (Traditional Chinese) (PDF)
5D Portfolio Press Release (Traditional Chinese) - Taiwan PDF : 5D Portfolio Press Release (Traditional Chinese) (PDF)
InspectionReviewPortfolio Press Release (Traditional Chinese) - Taiwan PDF : InspectionReviewPortfolio press release (Traditional Chinese) (PDF)
TeronSL650 Press Release (Traditional Chinese) - Taiwan PDF : TeronSL650 Press Release (Traditional Chinese) (PDF)
2910 EDR-7100 Jul 2013 (Traditional Chinese) - Taiwan PDF : 2910 eDR-7100 Jul 2013 (Traditional Chinese) (PDF)
NanoPoint Press Release Apr 2013 (Traditional Chinese) - Taiwan PDF : NanoPoint press release Apr 2013 (Traditional Chinese) (PDF)
Advanced Patterning Press Release(Traditional Chinese) - Taiwan PDF : Advanced Patterning Press Release(Traditional Chinese) (PDF)
Advanced Metrology Portfolio PDF : Advanced Metrology Portfolio (PDF)
Mask Inspection Portolfio PDF : Mask Inspection Portolfio (PDF)
Advanced Inspection Portfolio July 2016 (Simplified Chinese) PDF : Advanced Inspection Portfolio July 2016 (Simplified Chinese) (PDF)
Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Simplified Chinese) PDF : Advanced Packaging CIRCL-AP ICOST830 Press Release April 2015 (Simplified Chinese) (PDF)
5D Portfolio Press Release (Simplified Chinese) PDF : 5D Portfolio Press Release (Simplified Chinese) (PDF)
InspectionReviewPortfolio Press Release (Simplified Chinese) PDF : InspectionReviewPortfolio press release (Simplified Chinese) (PDF)
TeronSL650 Press Release (Simplified Chinese) PDF : TeronSL650 Press Release (Simplified Chinese) (PDF)
2910 EDR-7100 Jul 2013 (Simplified Chinese) PDF : 2910 eDR-7100 Jul 2013 (Simplified Chinese) (PDF)
NanoPoint Overview PDF : NanoPoint Overview (PDF)
Process Window Qualification Using NanoPoint PDF : Process Window Qualification using NanoPoint (PDF)
Accelerate Yield: Design Based Inspection PDF : Accelerate Yield: Design Based Inspection (PDF)
Back To Basics: After-Develop Inspection PDF : Back to Basics: After-Develop Inspection (PDF)
Comparing Patterned Wafer Inspectors - WATIP PDF : Comparing Patterned Wafer Inspectors - WATIP (PDF)
Immersion Lithography Defect Control PDF : Immersion Lithography Defect Control (PDF)
Automated Systematic Discovery For Development And Production PDF : Automated Systematic Discovery for Development and Production (PDF)
The Analysis Of EUV Mask Defects Using A Wafer Defect Inspection System PDF : The Analysis of EUV Mask Defects Using a Wafer Defect Inspection System (PDF)
Assessing EUV Mask Defectivity PDF : Assessing EUV Mask Defectivity (PDF)
Systematic Defect Management By Design Aware Inspection PDF : Systematic Defect Management by Design Aware Inspection (PDF)
Improving Tool Efficiency Through Automated Process Window Qualification PDF : Improving Tool Efficiency through Automated Process Window Qualification (PDF)
Process Window Centering For 22 Nm Lithography PDF : Process Window Centering for 22 nm Lithography (PDF)
A New Decision Paradigm For Comparing Patterned Wafer Inspectors PDF : A New Decision Paradigm for Comparing Patterned Wafer Inspectors (PDF)
Defect Monitoring On Memory Devices Using Broadband Brightfield Inspection PDF : Defect Monitoring on Memory Devices Using Broadband Brightfield Inspection (PDF)
Using Design Based Binning To Improve Defect Excursion Control For 45nm Production PDF : Using Design Based Binning to Improve Defect Excursion Control for 45nm Production (PDF)
Defect Criticality Index (DCI): A New Methodology To Improve DOI Sampling Rate PDF : Defect Criticality Index (DCI): A New Methodology to Improve DOI Sampling Rate (PDF)
Advantages Of Broadband Illumination For Critical Defect Capture At The 65nm Node And Below PDF : Advantages of Broadband Illumination for Critical Defect Capture at the 65nm Node and Below (PDF)
Broadband Brightfield Inspection Enables Advanced Immersion Lithography Defect Detection PDF : Broadband Brightfield Inspection Enables Advanced Immersion Lithography Defect Detection (PDF)
Candela CS20 Brochure - Candela CS20 Defect Detection PDF : Candela CS20 Brochure (PDF)
Emerging Standardization For Sapphire Substrate Inspection - Candela CS20 Defect Detection PDF : Emerging Standardization For Sapphire Substrate Inspection (PDF)
Optimising LED Manufacturing - Candela CS20 Defect Detection PDF : Optimising LED Manufacturing (PDF)
ICOS WI-22X0 Series - ICOS WI-2220 PDF : ICOS WI-22X0 Series (PDF)
Klarity LED Product Overview PDF : Klarity LED Product Overview (PDF)
Comprehensive Inspection Techniques Can Underpin High-yield LED Manufacturing - KLARITY LED PDF : Comprehensive inspection techniques can underpin high-yield LED manufacturing (PDF)
Automated Defect-data Analysis Allows Comprehensive Yield Management In LED Manufacturing - KLARITY LED PDF : Automated defect-data analysis allows comprehensive yield management in LED manufacturing (PDF)
Klarity ACE XP Product Overview PDF : Klarity ACE XP Product Overview (PDF)
Klarity SSA Product Overview PDF : Klarity SSA Product Overview (PDF)
RS-100 Product Overview PDF : RS-100 Product Overview (PDF)
RS-200 Product Overview PDF : RS-200 Product Overview (PDF)
Use Of Multiple Azimuthal Angles To Enable Advanced Scatterometry Applications - SpectraShape Family PDF : Use of Multiple Azimuthal Angles to Enable Advanced Scatterometry Applications (PDF)
Improved Scatterometry Time To Solution For Leading-Edge Logic Applications - SpectraShape Family PDF : Improved Scatterometry Time to Solution for Leading-Edge Logic Applications (PDF)
Klarity Bitmap Product Overview PDF : Klarity Bitmap Product Overview (PDF)
Design Data Improves Narrowband Inspection Results - Puma Family PDF : Design Data Improves Narrowband Inspection Results (PDF)
Comparing Patterned Wafer Inspectors: WATIP - Puma Family PDF : Comparing Patterned Wafer Inspectors: WATIP (PDF)
Advanced Darkfield Inspection - Puma Family PDF : Advanced Darkfield Inspection (PDF)
Advanced Excursion Control And Diagnostics For CMP Process Monitoring - Puma Family PDF : Advanced Excursion Control and Diagnostics for CMP Process Monitoring (PDF)
Immersion And Dry Lithography Monitoring For Flash Memories Using A Darkfield Imaging Inspector - Puma Family PDF : Immersion and dry lithography monitoring for flash memories using a darkfield imaging inspector (PDF)
Optimizing Feedback Time Using High-Throughput Darkfield Imaging (English) - Puma Family PDF : Optimizing Feedback Time using High-Throughput Darkfield Imaging (English) (PDF)
Optimizing Feedback Time Using High-Throughput Darkfield Imaging (Traditional Chinese) - Puma Family PDF : Optimizing Feedback Time using High-Throughput Darkfield Imaging (Traditional Chinese) (PDF)
Metal Line Sidewall Void Monitoring Using Darkfield Imaging Inspector (Traditional Chinese) - Puma Family PDF : Metal Line Sidewall Void Monitoring using Darkfield Imaging Inspector (Traditional Chinese) (PDF)
A New Decision Paradigm For Comparing Patterned Wafer Inspectors - Puma Family PDF : A New Decision Paradigm For Comparing Patterned Wafer Inspectors (PDF)
The Winning Streak: Advanced Darkfield Inspection For 65nm Design Rules And Below - Puma Family PDF : The Winning Streak: Advanced Darkfield Inspection for 65nm Design Rules and Below (PDF)
Implant Process Monitoring - I3 Integral For Implant PDF : Implant Process Monitoring (PDF)
SensArray Diagnostics Collector V.1.0.7 - Software Upgrades SensArray Diagnostics Collector V.1.0.7 : Software Upgrades (ZIP)
Etch Process Monitoring - EtchTemp Plasma Etch Wafer Temperature Measurement Tool PDF : Etch Process Monitoring (PDF)
Wet Application Process Monitoring - I3 Integral For Wet Applications PDF : Wet Application Process Monitoring (PDF)
Process Probe™ 1535 - SensArray 1535 Temperature Monitoring Probe PDF : Process Probe™ 1535 (PDF)
Process Probe™ 1630 SAN004 - SensArray 1630 PDF : Process Probe™ 1630 SAN004 (PDF)
Process Probe™ 1730 - SensArray 1730 PDF : Process Probe™ 1730 (PDF)
Process Probe™ 1850 - SensArray 1850 PDF : Process Probe™ 1850 (PDF)
Integrated Wafer Overview - Integrated Wafer Processes PDF : Integrated Wafer Overview (PDF)
SensArray 2050 Product Overview PDF : SensArray 2050 Product Overview (PDF)
SensArray 2070 Product Overview PDF : SensArray 2070 Product Overview (PDF)
Process Probe™ 1530 - SensArray Process Probe 1530 PDF : Process Probe™ 1530 (PDF)
Process Probe™ 1530 SAN003 - SensArray Process Probe 1530 PDF : Process Probe™ 1530 SAN003 (PDF)
Process Probe™ 1530 SAN005 - SensArray Process Probe 1530 PDF : Process Probe™ 1530 SAN005 (PDF)
Candela CS20 Brochure - Candela CSxx PDF : Candela CS20 Brochure (PDF)
Emerging Standardization For Sapphire Substrate Inspection - Candela CSxx PDF : Emerging Standardization For Sapphire Substrate Inspection (PDF)
Optimising LED Manufacturing - Candela CSxx PDF : Optimising LED Manufacturing (PDF)
Gallium Arsenide Epi Defects - Candela CS10 Optical X-BeamTM Surface Analyzer PDF : Gallium Arsenide Epi Defects (PDF)
Gallium Arsenide Wafer Inspection - Candela CS10 Optical X-BeamTM Surface Analyzer PDF : Gallium Arsenide Wafer Inspection (PDF)
Inspection Of Transparent Substrates - Candela CS10 Optical X-BeamTM Surface Analyzer PDF : Inspection of Transparent Substrates (PDF)
Silicon Carbide Defects - Candela CS10 Optical X-BeamTM Surface Analyzer PDF : Silicon Carbide Defects (PDF)
MicroXAM-100 Product Overview - MicroXAM - 100 3D Surface Profilometer PDF : MicroXAM-100 Product Overview (PDF)
MicroXAM - 800 Brochure - MicroXAM - 800 Optical Interferometer PDF : MicroXAM - 800 Brochure (PDF)

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