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Axcelis Technologies

At Axcelis, we make semiconductor manufacturing more productive every day. The company's product offering comprises a powerful suite of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Chip manufacturers around the globe rely on Axcelis' tools and process expertise to form the transistors. - Semiconductor manufacturer

Ion Implant, High Current, High Energy, Mid Current, & more.

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Read White Paper > - Ion Implant Axcelis Integrationborontempcontrol : Read white paper > (PDF)
Read White Paper > - Ion Implant Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
58380 1st Silicon - Read Data Sheet > - Support Programs 58380 1st Silicon : Read data sheet > (PDF)
Read White Paper > - Performance Upgrades Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
58380 1st Silicon - Read Data Sheet > - Support Services 58380 1st Silicon : Read data sheet > (PDF)
Read White Paper > - Upgrades PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Upgrades Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - Precision PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Precision Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - Productivity PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Productivity Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - Purity PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Purity Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - Conversation With A Scientist PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Conversation With A Scientist Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
AxcelisBeamAngleCorrection - Read White Paper > - White Papers WHITE PAPERS AxcelisBeamAngleCorrection : Read white paper > (PDF)
Satoh XEx Intelliscan - Read White Paper > - White Papers WHITE PAPERS Satoh XEx Intelliscan : Read white paper > (PDF)
XEx Intelliscan Uniformity - Read White Paper > - White Papers WHITE PAPERS XEx Intelliscan Uniformity : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Optimization Of Cleanliness And Oxidation In Plasma Doped Photoresist Strip : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Axcelis Effluentmngtnonoxidizingplasmastrip : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Temperature Control In Ion Implanation 0 : Read white paper > (PDF)
Read White Paper > - Angle Performance On Purion M - White Papers WHITE PAPERS Axcelis AnglePerformanceControl : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Axcelis Integrationborontempcontrol : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Axcelis Studyofcontrolledoxygendrystrip : Read white paper > (PDF)
Read White Paper > - White Papers WHITE PAPERS Ion Implantation In Silicon Technology : Read white paper > (PDF)
Read The Article > Axcelis Integrationborontempcontrol : Read the article > (PDF)
Read The Article > Axcelis Optimaxe Angle Performance : Read the article > (PDF)
Read The Article > Axcelis Studyofcontrolledoxygendrystrip : Read the article > (PDF)
Read White Paper > - Read More > Photorest Strip Chalenges For Advanced Lithography : Read white paper > (PDF)
Read White Paper > - Read More > Plasma Doping Photoresist Strip : Read white paper > (PDF)
Read White Paper > - Read More > Axcelis Integrationborontempcontrol : Read white paper > (PDF)
Read White Paper > - Read More > Axcelis Studyofcontrolledoxygendrystrip : Read white paper > (PDF)
Read White Paper > - Workplace Axcelis Safetyconsiderationsimplanter : Read white paper > (PDF)
Read White Paper > - Workplace Axcelis Ehs Evalg4f4decaboranesourcemat : Read white paper > (PDF)
999000967 - Stormwater Pollution Prevention Plan - PDF 999000967 : Stormwater Pollution Prevention Plan - PDF (PDF)
Msgp2015 Finalpermit - Copy Of 2015 MSGP Msgp2015 Finalpermit : Copy of 2015 MSGP (PDF)
EPA Letter Of Receipt Of Axcelis' ENOI 2015-08-26 EPA ENOI Reciept Email : EPA Letter of Receipt of Axcelis' eNOI (PDF)
Read White Paper > - Optima HDx Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read White Paper > - Optima HDx Axcelis Integrationborontempcontrol : Read white paper > (PDF)
Read White Paper > - High Current Axcelis Integrationborontempcontrol : Read white paper > (PDF)
Read White Paper > - High Current Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
Read White Paper > - Paradigm Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
Read White Paper > - Optima XEx Axcelis Optimaxe Angle Performance : Read white paper > (PDF)
Read White Paper > - Mid Current PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Cleaning Axcelis Cleaningchallengesapproaches32nm : Read white paper > (PDF)
Read White Paper > - Rapid Strip 320 Axcelis Cleaningchallengesapproaches32nm : Read white paper > (PDF)
Read White Paper > - RapidStrip 210 Axcelis Oxygenfreeplasmachipscalepkg : Read white paper > (PDF)
Read White Paper > - Technical Library Axcelis Studyofcontrolledoxygendrystrip : Read white paper > (PDF)
Read White Paper > - Introducing The Purion H - Purion H PURION H IntroducingThePurionH Vanderberg FINAL : Read White Paper > (PDF)
MicrowavePEF AxcelisIIT2012 - Read White Paper > - Purion H PURION H MicrowavePEF AxcelisIIT2012 : Read White Paper > (PDF)
View Presentation > - Purion XE PURION XE PurionXE Contamination Control : View presentation > (PDF)
Read White Paper > - Purion M PurionM Angle Performance IIT2012 : Read white paper > (PDF)
22nm-details Presentation - 22nm-details presentation - Ion Implantation For FinFET Devices 22nm-details Presentation : Ion Implantation for FinFET Devices (PDF)
17725 - Improved In Source Stability Using H2 Co-gas For Flouride Based Dopants 17725 : Improved In Source Stability Using H2 Co-gas for Flouride Based Dopants (PDF)
Poster - Implant Damage Engineering With Reduced Temperature: How Cold Is Enough? Rubin Ameen Damage Engineering : poster (PDF)
Whitepaper - Advancements In Angle Control And Correction To Meet Today's Critical Device Requirements Axcelis AnglePerformanceControl : whitepaper (PDF)
Whitepaper - Impact Of Wafer Cleaning On Intra- And Inter-Die Non-Uniformity Axcelis Studyofcontrolledoxygendrystrip : whitepaper (PDF)
AxcelisBeamAngleCorrection - Beam Angle Control Upgrade AxcelisBeamAngleCorrection : Beam Angle Control Upgrade (PDF)
Enhanced Life Ion Source IIT2012 0 (PDF)
Thin Upgrade 150mm Thin Upgrade 150mm (PDF)
ProductivityImprovementsUsingOptiScan (PDF)
The Power Of Purion The Power Of Purion (PDF)
Read White Paper > PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
PurionXE Contamination Control (PDF)
Read White Paper > - Conversation With Experts PurionM Angle Performance IIT2012 : Read white paper > (PDF)
Read White Paper > - Conversation With Experts Enhanced Life Ion Source IIT2012 0 : Read white paper > (PDF)
Read The Article > - News And Events Axcelis Integrationborontempcontrol : Read the article > (PDF)
999000967 - Stormwater Pollution Prevention Plan - PDF - SWPPP 999000967 : Stormwater Pollution Prevention Plan - PDF (PDF)
Msgp2015 Finalpermit - Copy Of 2015 MSGP - SWPPP Msgp2015 Finalpermit : Copy of 2015 MSGP (PDF)
EPA Letter Of Receipt Of Axcelis' ENOI - SWPPP 2015-08-26 EPA ENOI Reciept Email : EPA Letter of Receipt of Axcelis' eNOI (PDF)
Fish And Wildlife Service Endangered Species List: Axcelis Action Area - SWPPP 2015-08-05 Official Species List Expanded Action Area : Fish and Wildlife Service Endangered Species List: Axcelis Action Area (PDF)
2007 Historical Sites - Historical Sites Determination - SWPPP 2007 Historical Sites : Historical Sites Determination (PDF)
999001794 Rev A - Facility Drainage Plan And Property Boundary - SWPPP 999001794 Rev A : Facility Drainage Plan and Property Boundary (PDF)
MA Salem 20150708 TM Geo - Site Location Map - SWPPP MA Salem 20150708 TM Geo : Site Location Map (PDF)
AxcelisBeamAngleCorrection - Read White Paper > AxcelisBeamAngleCorrection : Read white paper > (PDF)
Productivity ProductivityImprovementsUsingOptiScan : Productivity (PDF)
Productivity Enhanced Life Ion Source IIT2012 0 : Productivity (PDF)
The Power Of Purion - Productivity The Power Of Purion : Productivity (PDF)
PurionM Energy Efficiency - Productivity PurionM Energy Efficiency : Productivity (PDF)
Upgrades Enhanced Life Ion Source IIT2012 0 : Upgrades (PDF)
AxcelisBeamAngleCorrection - Upgrades AxcelisBeamAngleCorrection : Upgrades (PDF)
Thin Upgrade 150mm - Upgrades Thin Upgrade 150mm : Upgrades (PDF)
PurionM Energy Efficiency PurionM Energy Efficiency (PDF)
Purity PurionXE Contamination Control : Purity (PDF)
Purion Eterna ELS Source Enhanced Life Ion Source IIT2012 0 : Purion Eterna ELS Source (PDF)
The Power Of Purion - Purion Productivity Advantage The Power Of Purion : Purion Productivity Advantage (PDF)
Thin Upgrade 150mm - Axcelis Thin Wafer Handling Upgrade Thin Upgrade 150mm : Axcelis Thin Wafer Handling Upgrade (PDF)
PurionM Energy Efficiency - Purion M - >50% Energy Consumption Advantage PurionM Energy Efficiency : Purion M - >50% Energy Consumption Advantage (PDF)
Presentation Can Be Downloaded Here. - Purion XE - Superior Contamination Control PurionXE Contamination Control : Presentation can be downloaded here. (PDF)

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