MPX5100/D MPX5100 MPX5100D MPX5100A MPX5100GV AN1646 5100GV 5100D MPX5100DP - Datasheet Archive

 

Order this document by MPX5100/D SEMICONDUCTOR TECHNICAL DATA MPX5100 SERIES Integrated Silicon Pressure Sensor On-Chip Signal

 

MOTOROLA Order this document by MPX5100/D MPX5100/D SEMICONDUCTOR TECHNICAL DATA MPX5100 MPX5100 SERIES Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5100 MPX5100 series piezoresistive transducer is a state­of­the­art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin­film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 100 kPa (0 to 14.5 psi) 15 to 115 kPa (2.18 to 16.68 psi) 0.2 to 4.7 Volts Output Features · 2.5% Maximum Error over 0° to 85°C · Ideally suited for Microprocessor or Microcontroller­Based Systems · Patented Silicon Shear Stress Strain Gauge · Available in Absolute, Differential and Gauge Configurations BASIC CHIP CARRIER ELEMENT CASE 867­08, STYLE 1 · Durable Epoxy Unibody Element · Easy­to­Use Chip Carrier Option VS THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 SENSING ELEMENT GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY Vout DIFFERENTIAL PORT OPTION CASE 867C­05, STYLE 1 PINS 4, 5 AND 6 ARE NO CONNECTS GND NOTE: Pin 1 is the notched pin. Figure 1. Fully Integrated Pressure Sensor Schematic PIN NUMBER MAXIMUM RATINGS(1) Parametrics 1 Vout 4 N/C Symbol Value Unit 2 Gnd 5 N/C Overpressure(2) (P1 > P2) (P2 > P1) Pmax 400 400 kPa 3 VS 6 N/C Burst Pressure(2) (P1 > P2) Pburst 1000 kPa Tstg ­ 40° to +125° °C TA ­ 40° to +125° °C Storage Temperature Operating Temperature NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. REV 6 Motorola Sensor Device Data © Motorola, Inc. 1998 1 MPX5100 MPX5100 SERIES OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Typ Max Unit POP 0 15 0 - - - 100 115 100 kPa Supply Voltage(2) VS 4.75 5.0 5.25 Vdc Supply Current Io - 7.0 10 mAdc Voff 0.088 0.20 0.313 Vdc Pressure Range(1) Gauge, Differential: MPX5100D MPX5100D Absolute: MPX5100A MPX5100A Vacuum: MPX5100GV MPX5100GV(11) Minimum Pressure Offset(3) @ VS = 5.0 Volts (0 to 85°C) Full Scale Output(4) @ VS = 5.0 Volts Differential and Absolute (0 to 85°C) Vacuum(11) VFSO 4.587 3.688 4.700 3.800 4.813 3.913 Vdc Full Scale Span(5) @ VS = 5.0 Volts Differential and Absolute (0 to 85°C) Vacuum(11) VFSS - - 4.500 3.600 - - Vdc - - - "2.5 %VFSS V/P - 45 - mV/kPa Response Time(7) tR - 1.0 - mS Output Source Current at Full Scale Output Io+ - 0.1 - mAdc Warm­Up Time(8) - - 20 mSec - - "0.5 - Offset Stability(9) - %VFSS Symbol Min Typ Max Unit Weight, Basic Element (Case 867) - - 4.0 - Grams Common Mode Line Pressure(10) - - - 690 kPa Accuracy(6) Sensitivity Decoupling circuit shown in Figure 4 required to meet electrical specifications. MECHANICAL CHARACTERISTICS Characteristic NOTES: 1. 1.0kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: · Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. · Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. · Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. · TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. · TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. · Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm­up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Common mode pressures beyond what is specified may result in leakage at the case­to­lead interface. 11. Pressure Range: Vacuum sensor is rated to 100 kPa; part is tested to a vacuum pressure equivalent to 80 kPa. 2 Motorola Sensor Device Data MPX5100 MPX5100 SERIES ON­CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING 5 VS = 5 Vdc TA = 25°C MPX5100 MPX5100 4 MAX TYP SPAN RANGE (TYP) 3.5 3 2.5 OUTPUT RANGE (TYP) 4.5 OUTPUT (V) Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) MIN 2 1.5 1 110 100 90 80 70 60 50 40 30 20 10 0 0 0.5 OFFSET (TYP) PRESSURE (kPa) Figure 2. Output versus Pressure Differential STAINLESS STEEL METAL COVER EPOXY PLASTIC CASE DIE ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ WIRE BOND DIFFERENTIAL/GAUGE ELEMENT DIE WIRE BOND LEAD FRAME DIE BOND LEAD FRAME FLUORO SILICONE GEL DIE COAT STAINLESS STEEL METAL COVER EPOXY PLASTIC CASE ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ FLUORO SILICONE GEL DIE COAT ABSOLUTE ELEMENT DIE BOND Figure 3. Cross­Sectional Diagrams (Not to Scale) Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX5100 MPX5100 series pressure sensor operating char- acteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long­term reliability. Contact the factory for information regarding media compatibility in your application. +5 V VS IPS m 1.0 F Vout GND OUTPUT m 0.01 F Figure 4. Recommended Power Supply Decoupling. For output filtering recommendations, please refer to Application Note AN1646 AN1646. Motorola Sensor Device Data 3 MPX5100 MPX5100 SERIES Transfer Function (MPX5100D MPX5100D, MPX5100GV MPX5100GV) Nominal Transfer Value: Vout = VS (P x 0.009 + 0.04) +/­ (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ±5% P kPa Temperature Error Multiplier Break Points MPX5100D MPX5100D Series Temp 3.0 Multiplier ­ 40 0 to 85 +125 4.0 3 1 3 2.0 1.0 0.0 ­40 ­20 0 20 40 80 60 100 120 130 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from 0° to ­40°C and from 85° to 125°C. Pressure Error Band Error Limits for Pressure 3.0 Error (kPa) 2.0 1.0 0.0 0 20 40 60 80 100 120 Pressure in kPa ­1.0 ­2.0 ­3.0 MPX5100D MPX5100D Series Pressure Error (max) 0 to 100 kPa ± 2.5 kPa NOTE: For vacuum type parts (5100GV 5100GV), Transfer Function is the same as that for 5100D 5100D Series. 4 Motorola Sensor Device Data MPX5100 MPX5100 SERIES Transfer Function (MPX5100A MPX5100A) Nominal Transfer Value: Vout = VS (P x 0.009 ­ 0.095) +/­ (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ±5% P kPa Temperature Error Multiplier Break Points MPX5100A MPX5100A Series Temp 4.0 Multiplier ­ 40 0 to 85 +125 3.0 3 1 3 2.0 1.0 0.0 ­40 ­20 0 20 40 60 80 100 120 130 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from 0° to ­40°C and from 85° to 125°C. Pressure Error Band Error Limits for Pressure 3.0 Error (kPa) 2.0 1.0 0.0 0 20 40 60 80 100 130 Pressure in kPa ­1.0 ­2.0 ­3.0 MPX5100A MPX5100A Series Pressure Error (max) 15 to 115 kPa ± 2.5 kPa Motorola Sensor Device Data 5 MPX5100 MPX5100 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX Part Number pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the Table below: Pressure (P1) Side Identifier Case Type MPX5100A MPX5100A, MPX5100D MPX5100D 867­08 Stainless Steel Cap MPX5100DP MPX5100DP 867C­05 Side with Part Marking MPX5100AP MPX5100AP, MPX5100GP MPX5100GP 867B­04 Side with Port Attached MPX5100GVP MPX5100GVP 867D­04 Stainless Steel Cap MPX5100AS MPX5100AS, MPX5100GS MPX5100GS 867E­03 Side with Port Attached MPX5100GVS MPX5100GVS 867A­04 Stainless Steel Cap MPX5100ASX MPX5100ASX, MPX5100GSX MPX5100GSX 867F­03 Side with Port Attached MPX5100GVSX MPX5100GVSX 867G­03 Stainless Steel Cap ORDERING INFORMATION: The MPX5100 MPX5100 pressure sensor is available in absolute, differential, and gauge configurations. Devices are available in the basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connections. MPX Series Device Name D i N Basic Element Options O i Case Type C T Order Number Device Marking MPX5100A MPX5100A MPX5100A MPX5100A 867­08 MPX5100D MPX5100D MPX5100D MPX5100D Differential Dual Ports 867C­05 MPX5100DP MPX5100DP MPX5100DP MPX5100DP Absolute, Single Port 867B­04 MPX5100AP MPX5100AP MPX5100AP MPX5100AP Gauge, Single Port 867B­04 MPX5100GP MPX5100GP MPX5100GP MPX5100GP Gauge, Vacuum Port 867D­04 MPX5100GVP MPX5100GVP MPX5100GVP MPX5100GVP Absolute, Axial 867E­03 MPX5100AS MPX5100AS MPX5100A MPX5100A Gauge, Axial 867E­03 MPX5100GS MPX5100GS MPX5100D MPX5100D Gauge, Vacuum Axial 867A­04 MPX5100GVS MPX5100GVS MPX5100D MPX5100D Absolute, Axial PC Mount 867F­03 MPX5100ASX MPX5100ASX MPX5100A MPX5100A Gauge, Axial PC Mount 867F­03 MPX5100GSX MPX5100GSX MPX5100D MPX5100D Gauge Vacuum Axial PC Mount 6 867­08 Differential Ported Elements Absolute 867G­03 MPX5100GVSX MPX5100GVSX MPX5100D MPX5100D Motorola Sensor Device Data MPX5100 MPX5100 SERIES PACKAGE DIMENSIONS C NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION ­A­ IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). R POSITIVE PRESSURE (P1) M B ­A­ N PIN 1 SEATING PLANE 1 2 3 4 5 DIM A B C D F G J L M N R S L 6 ­T­ G J S F D 6 PL 0.136 (0.005) T A M M INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 STYLE 1: PIN 1. 2. 3. 4. 5. 6. CASE 867­08 ISSUE N MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 VOUT GROUND VCC V1 V2 VEX BASIC ELEMENT (A, D) A C ­B­ NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. POSITIVE PRESSURE (P1) V DIM A B C D E F G J K N S V PIN 1 PORT #2 VACUUM (P2) 1 K J N E ­T­ 2 3 4 5 6 S G F D 6 PL 0.13 (0.005) M T B M INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 VOUT GROUND VCC V1 V2 VEX CASE 867A­04 ISSUE E VACUUM SIDE PORTED (GVS) Motorola Sensor Device Data 7 MPX5100 MPX5100 SERIES PACKAGE DIMENSIONS­CONTINUED ­T­ A U L SEATING PLANE R NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. PORT #1 POSITIVE PRESSURE (P1) V ­Q­ N B K 1 2 3 4 5 6 PIN 1 ­P­ C 0.25 (0.010) J M T Q S G M D 6 PL 0.13 (0.005) F M T P INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 DIM A B C D F G J K L N P Q R S U V Q S S CASE 867B­04 ISSUE E STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 VOUT GROUND VCC V1 V2 VEX PRESSURE SIDE PORTED (AP, GP) P 0.25 (0.010) M T Q U W X R PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. ­A­ M L V PORT #2 VACUUM (P2) PORT #1 POSITIVE PRESSURE (P1) N ­Q­ PORT #2 VACUUM (P2) B PIN 1 1 2 3 4 5 K 6 C SEATING PLANE ­T­ ­T­ J S SEATING PLANE D 6 PL G F 0.13 (0.005) M A M CASE 867C­05 ISSUE F DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06 VOUT GROUND VCC V1 V2 VEX PRESSURE AND VACUUM SIDES PORTED (DP) 8 Motorola Sensor Device Data MPX5100 MPX5100 SERIES PACKAGE DIMENSIONS­CONTINUED 0.25 (0.010) ­P­ T Q M M NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. A U ­T­ SEATING PLANE PORT #2 VACUUM (P2) L V R DIM A B C D F G J K L N P Q R S U V POSITIVE PRESSURE (P1) ­Q­ N B PIN 1 1 2 3 4 5 K 6 S C G J D 6 PL F 0.13 (0.005) M T P S Q INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. S CASE 867D­04 ISSUE F MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 VOUT GROUND VCC V1 V2 VEX VACUUM SIDE PORTED (GVP) C ­B­ NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. A DIM A B C D E F G J K N S V V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 K J N 5 ­T­ 3 2 1 S G F E 4 D 6 PL 0.13 (0.005) M T B M INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 VOUT GROUND VCC V1 V2 VEX CASE 867E­03 ISSUE D PRESSURE SIDE PORTED (AS, GS) Motorola Sensor Device Data 9 MPX5100 MPX5100 SERIES PACKAGE DIMENSIONS­CONTINUED ­T­ C A U E ­Q­ N V B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) ­P­ 0.25 (0.010) T Q M 6 M 5 4 3 2 1 S K J 0.13 (0.005) M T P S D 6 PL Q S G NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. F MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 VOUT GROUND VCC V1 V2 VEX CASE 867F­03 ISSUE D PRESSURE SIDE PORTED (ASX, GSX) ­T­ C A E ­Q­ U POSITIVE PRESSURE (P1) N V B R PORT #2 VACUUM (P2) PIN 1 ­P­ 0.25 (0.010) M T Q M 1 2 3 4 5 6 S K J 0.13 (0.005) M T P S D 6 PL Q S G F NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 VOUT GROUND VCC V1 V2 VEX CASE 867G­03 ISSUE D VACUUM SIDE PORTED (GVSX) 10 Motorola Sensor Device Data MPX5100 MPX5100 SERIES Motorola reserves the right to make changes without further notice to any products herein. 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Motorola Sensor Device Data 11 MPX5100 MPX5100 SERIES Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1­303­675­2140 or 1­800­441­2447 JAPAN: Nippon Motorola Ltd.; SPD, Strategic Planning Office, 141, 4­32­1 Nishi­Gotanda, Shinagawa­ku, Tokyo, Japan. 81­3­5487­8488 Customer Focus Center: 1­800­521­6274 MfaxTM: RMFAX0@email.sps.mot.com ­ TOUCHTONE 1­602­244­6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, Motorola Fax Back System ­ US & Canada ONLY 1­800­774­1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852­26629298 ­ http://sps.motorola.com/mfax/ HOME PAGE: http://motorola.com/sps/ 12 MPX5100/D MPX5100/D Motorola Sensor Device Data